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Application and maintenance methods of trace oxygen analyzer
Date: 2025-09-11Read: 0

Trace oxygen analyzer, as a high-precision gas detection device, is widely used in fields such as semiconductor manufacturing, medical sterilization, and electronic industry that are sensitive to oxygen concentration. Its core function is throughNernstZirconium core technology achieves micro oxygen level(10⁻³⁰to100%Range detection has the characteristics of high measurement accuracy and fast response speed. The following analysis will be conducted from two aspects: application scenarios and maintenance methods.

1、 Core application scenarios

semiconductor manufacturing
In processes such as chip packaging and photoresist coating, trace amounts of oxygen can cause material oxidation, affecting product yield. The trace oxygen analyzer can monitor the oxygen concentration in the clean room in real time, ensuring that the environmental oxygen content is below1ppmFor example, a certain12By deploying this equipment, the inch wafer fab has reduced the oxidation defect rate to0.03%.

Medical bacterial cultivation equipment
Medical incubators require strict control of oxygen concentration to simulate specific microbial growth environments. The trace oxygen analyzer can be linked to the ventilation system to automatically adjust the nitrogen injection amount and maintain the oxygen concentration inside the box5%±0.1%Within the scope, ensure the stability of vaccine and probiotic cultivation.

Electronic glove box
Synthesis of electrode materials for lithium batteriesOLEDIn scenarios such as display panel manufacturing, the oxygen concentration inside the glove box needs to be controlled within0.1ppmfollowing. Trace oxygen analyzer1/2″BSPTQuick installation of pipe threads and coordinationPVCGas connection pipe for real-time monitoring and alarm of oxygen concentration.

Archives and Cultural Relics Protection
In the display frame of ancient calligraphy and painting and the disinfection box of archives, the trace oxygen analyzer can detect the displacement effect of inert gases (such as nitrogen) to prevent cultural relics from oxidizing and fading. For example, after a museum adopted this equipment, the fading cycle of calligraphy and painting was extended to traditional methods3Twice.

2、 Scientific maintenance methods

Daily usage standards

Environmental control: The equipment needs to be in0℃Operate at room temperature to avoid the deterioration of zirconium core life caused by high temperature.

Gas connection management: using outer diameter6.4mmInner diameter4mmofPVCConnect the gas pipe and verify that the gas flow rate is controlled within500ml/minTo prevent damage to the sensor caused by airflow impact.

Operation taboo: It is strictly prohibited to exceed negative pressure-5kPaOr positive pressure exceeds10kPaUse in an environment to avoid zirconium core rupture.

Regular calibration and maintenance

Calibration cycle: every3Using standard gas for a month (such as5ppmCalibrate once with oxygen concentration and nitrogen to ensure measurement error≤±2%.

Probe cleaning: Wipe the probe housing with a dust-free cloth every month to prevent dust from blocking the air inlet.

Heater inspection: Every six months, the detection probe comes with a built-in heater function to ensure700℃Constant temperature state, to avoid the failure of zirconium core due to temperature fluctuations.

Troubleshooting and Maintenance

Slow response: If the response time exceeds4Second, need to checkKIs the thermocouple connection loose or has it been replaced4Zirconium batteries over years old.

Data fluctuations: fluctuations exceeding±5%When, use1/8″NPTRe calibrate the calibration gas for the threaded pipe joint connection and check itPVCIs there any leakage in the pipe.

Long term suspension treatment: Suspension exceeding1At the age of one month, the probe should be stored in a dry nitrogen environment to avoid moisture causing circuit short circuits.

Conclusion

The accuracy of trace oxygen analyzers depends on scientific application and maintenance. Users are required to strictly follow operating procedures, regularly calibrate equipment, and establish maintenance records to record calibration data, fault phenomena, and handling results. Through preventive maintenance, the service life of equipment can be significantly extended (usually up to4-6Reduce comprehensive usage costs and provide reliable support for high demand industrial scenarios.