Ultra high vacuum all metal plug valve | Born for the research of large scientific devices

The all metal plug valve designed by HTC Riyang Technology is suitable for ultra-high vacuum environments (10 ⁻⁸ Pa~10 ⁻⁹ Pa), using HTC Disc metal sealing technology. Its pressure range is generally between UHV~1.2 bar (abs), and the leakage rate is the highest<1×10 ⁻¹⁰ mbar・L/sReliable sealing. According to the different opening methods, it can be divided into manual/pneumatic types, and whether there areshieldingRF shieldingFunction, capable of withstanding temperatures ranging from 150 ℃ to 250 ℃. In recent years, in ChinaResearch on Large Scientific Devices、surface analysisandSemiconductor Manufacturing ProjectIn China, there have been many successful trial installation cases, and their reliability has been verified by the market.

all-metalslide gate valveIt is commonly used in high-energy physics laboratory projects, so there is a need to block RF signal leakage/intrusion and ensure stable particle beam transmission. Therefore, it is required that the plug-in valve has RF shielding function. In addition, low leakage rate, high temperature resistance, high cleanliness, radiation resistance, high service life, and stability and reliability are important standards for measuring the excellence of a full metal plug valve. In this regard, Riyang has successfully developed models of full metal plug valves such as CF35, CF63, and DF78 in cooperation with customers, becoming one of the few domestic manufacturers to achieve technological breakthroughs.

In 2020, Riyang collaborated with SHINE project in ChinaHard X-ray Free Electron Laser DeviceIn the project, Shouci overcame key technical challenges such as metal to metal hard sealing and high-precision positioning of the all metal plug-in valve, and successfully delivered the prototype. The all metal high-frequency shielding door valve was installed inSuperconducting acceleratorIn the electron beam channel, it operates under complex environmental conditions such as ultra-high vacuum, ultra clean, liquid helium low temperature, radio frequency field, and ionizing radiation.

In the following years, Riyang Technology made breakthroughs in CF35, CF63 and other sizes of valves. Based on the different actual environmental needs of customers, other sizes are also under development, and continuous improvement of performance and optimization of data are being carried out to truly achieve domestic substitution, contributing to the research of large scientific devices in China.