Novator fully automatic imaging system for aerial measurement of semiconductor molds

The Novator fully automatic imaging instrument adopts a flying measurement mode, which completes feature extraction during the rapid movement of the platform, making the measurement process smoother and the measurement time shorter.

Measuring the external dimensions of 320mm × 160mm, a mold containing 25920 circles, only takes 5 minutes. For this type of densely arranged workpiece, aerial photography measurement fully utilizes its advantages. Compared with traditional image measuring instruments, the measurement time is shortened from 1 hour to 5 minutes, the measurement efficiency is improved by more than 10 times, and the measurement accuracy is not lost. Effectively improve the efficiency of mold measurement, reduce human resource consumption, and reduce costs and increase efficiency for the semiconductor industry.