09,18,2026 11 views
In semiconductor manufacturing, there is nothing more important than accuracy. Every step in the process from chip manufacturing to final assembly of integrated circuits requires precise measurement to obtain high-quality and reproducible results. One of the key parameters that needs to be measured is humidity, as accurately maintaining the correct humidity level is crucial for achieving good equipment performance and final product quality.
Maintain a good environment:
When conducting nanoscale manufacturing, even small deviations can lead to catastrophic consequences. Accurate monitoring and maintenance of environmental conditions are necessary, as semiconductor components such as chips and printed circuit boards are highly susceptible to moisture. In fact, moisture is a pollutant that affects the semiconductor manufacturing process, and estimates indicate that losses caused by unfavorable humidity conditions account for up to 25% of revenue losses.
Excessive humidity can lead to corrosion, electrical short circuits, poor component quality, and higher failure rates. Low humidity can lead to static electricity accumulation, which can damage the semiconductor surface and significantly reduce production yield. Therefore, precise humidity control is crucial, making reliable sensors an indispensable investment - a wise investment that has a far greater impact than its scale or cost. High quality sensors and transmitters ensure that equipment and the environment remain within the appropriate range required for semiconductor manufacturing.
Measurement solutions in semiconductor manufacturing processes:
Let's take a look at some semiconductor manufacturing processes that are crucial for humidity management, as well as solutions that can provide assistance.
Silicon wafer polishing and cleaning:
Polishing and cleaning of silicon wafers are key steps in the semiconductor manufacturing process. This process involves high humidity and irritating chemicals, which may cause sensor drift and make accurate measurements more difficult.
The probe used in this environment needs to withstand high humidity levels and exposure to irritating chemicals. A good solution is the compact temperature and humidity probe HMP9, which is a compact probe with very fast response time. It can withstand high humidity levels and also has a chemical cleaning function for sensor cleaning after contamination. For device manufacturers, Vaisala also offers modular temperature and humidity products, such as the relative humidity and temperature module HMM170, which can be integrated into the final product.
Wafer lithography machine, coating and developing machine:
The wafer lithography machine used for coating and developing silicon chips is based on laser technology, so even small environmental changes can significantly affect the quality of the process. Environmental pressure, relative humidity, and temperature can all affect the lithography effect and lens focusing, so real-time monitoring and compensation are necessary. In nanoscale processes, precise measurement and monitoring of these parameters have become increasingly important.
A good solution for these devices is the modular Vaisala Indigo520, which provides air pressure as an optional measurement parameter. The temperature and humidity probe HMP3 is compatible with Indigo520, and its structure allows for on-site sensor replacement without the need for tools, making it an ideal choice for cleanroom environments. For process flows that require monitoring of other parameters such as CO2 and dew point, other types of probes can be used. No matter how you choose, the probe can be connected to a data processing unit (such as Indigo520), allowing you to flexibly choose the appropriate combination for specific process flows.
Wafer cutting and probe station:
The wafer cutting process separates individual chips from the wafer and requires accurate humidity measurement to protect the product and equipment. Condensation may be a problem, especially when the tape is peeled off, so careful monitoring of the dew point is necessary. During the probe testing process, the chip is subjected to temperature changes to test the performance of the integrated circuit. This process requires precise control of dew point and humidity to prevent condensation and rusting in the testing environment.
Vaisala offers a variety of compact products to monitor and control these parameters. The DMT143 small dew point transmitter has a wide measurement range, from -70 ° C to+60 ° C, and can be used for frost point and dew point measurements. Another option is the Vaisala Dew Point Transmitter DMT152, which is optimized for ultra dry conditions and can provide frost point measurements as low as -80 ° C with an error of+/-2 ° C. Both products have automatic calibration capabilities to ensure very long calibration intervals and are easy to integrate into OEM applications such as semiconductor manufacturing or testing equipment.
Quality of process pipeline gas:
Cleanrooms used in semiconductor manufacturing rely on high-quality, non reactive process gases such as nitrogen and argon. Ensuring the dryness of these gases is crucial for maintaining the purity of the process environment and avoiding potential contamination during sensitive manufacturing stages. It is necessary to monitor the humidity level in the process gas pipeline to ensure accurate measurement results. Use polished stainless steel pipes in pipelines as this helps ensure accurate and pollution-free readings are obtained.
Vaisala DRYCAP ® Sensors are highly suitable for monitoring gas dryness as they have extremely fast response times, saving expensive gases and protecting processes in case of malfunctions. They can also be automatically calibrated to achieve good long-term stability. The Vaisala Dew Point Transmitter DMT152 is a suitable choice for this application, providing real-time, high-quality measurement results. DMT152 should be installed directly in the airflow to ensure representative gas samples are obtained, and tapered threads should be used to prevent leakage. The Vaisala sampling chamber is made of polished stainless steel to ensure accurate and high-quality measurements.
The importance of humidity control:
Humidity control helps extend the lifespan of semiconductor manufacturing equipment and maintain the quality of the final product. By using high-quality sensors and transmitters throughout the entire production process to monitor and control humidity levels, manufacturers can protect their operations from humidity related issues, reduce costs, and maximize output.
Compact temperature and humidity probe HMP9 (suitable for rapidly changing application environments):
Vaisala HUMICAP ® The temperature and humidity probe HMP9 is specially designed to be easily installed in rapidly changing environments. Fast response time, measurement performance, and chemical resistance are essential in these environments. The compact size allows it to be installed in small spaces, with a probe diameter of only 5 millimeters (0.2 inches). For installation in pipelines and laboratory chambers, probes can be installed using pipeline installation kits.
Intelligent humidity and temperature probe HMP3 (for general humidity and temperature applications using interchangeable sensors):
Vaisala HUMICAP ® The intelligent humidity and temperature probe HMP3 is designed for general environments with moderate humidity and temperature levels. The probe structure allows for the replacement of sensors on site without the need for tools, making it suitable for industrial HVAC systems, paint booths, cleanrooms, environmental chambers, and applications where periodic recalibration is insufficient to maintain measurement accuracy.
