Active Vibration Isolation Platform STACIS IIIc

NegotiableUpdate on 12/14

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

Overview: STACIS IIIc is a compact version of the STACIS III * * active isolation system. It provides equally excellent vibration isolation performance at a reduced height. STACIS IIIc is very suitable for use on raised floors without or with very low floors, as the standard STACIS III series

Product Details

overview

STACIS IIIc is a compact version of the STACIS III * * active isolation system. It provides equally excellent vibration isolation performance at a reduced height.

STACIS IIIc is very suitable for use on raised floors without or with very low floors, as the height of the standard STACIS III system can make the instrument too high.

In the three isolator configuration, the isolator height is less than 60% of the conventional STACIS III height. In systems with three or more isolators, the height will be between 60% and 70%, depending on the effective load setting. For detailed information, please refer to the specifications below.

Advantages of STACIS IIIc

Compared with the conventional STACIS III system, the isolator height * * is reduced by 42%, but the performance is not reduced.

STACIS is hundreds of times stronger than air isolators and has no limitations of any air isolation system. It does not have a "soft" suspension, unlike active air systems, the STACIS can be placed under tools with internal active air isolation systems, allowing both systems to operate in a * * state.

Unique serial design and proprietary high force piezoelectric technology

It can achieve a wide active bandwidth of 0.6 Hz to 150 Hz and * * active isolation performance with 90% vibration reduction starting from 2 Hz.

performance

4500 lbs (2045 kg) payload tested with simulated vibration at VC-C
(500 μin./s, 12.5 μm/s RMS)

Performance specifications

specifications

Active degrees of freedom	6
Active bandwidth	0.6 Hz - 150 Hz
Passive natural frequency	18 Hz vertical and horizontal
Effective active resonance frequency	0.5 Hz
Isolation at 1 Hz	40% - 70%
Isolation at ≥ 2 Hz	≥90%
Stability time after 10 pounds (4.5 kilograms) step input (Reduce by 10:1)	0.3 seconds
internal noise	<0.1 nm RMSd>
The working load range of each isolator	Low load capacity: 400-1100 pounds (181-499 kilograms) Medium load-bearing capacity: 900-2100 pounds (408-953 kilograms) High load-bearing capacity: 1900-4500 pounds (862-2041 kilograms)
Stiffness (1000 pounds/454 kilograms mass, medium load-bearing capacity isolator)	40000 pounds per inch (73 x 10)⁵Cow/meter
Magnetic field emitted from a distance of 4 inches (102 millimeters) from the isolator	<0.02 μG broadband RMSd>

Design, size, environmental and utility requirements for isolators

Environment and safety	Compliant with CE and RoHS standards
Active isolation component	**A piezoelectric actuator with a small load-bearing capacity of 3300 pounds (1500 kilograms) receives signals from a high-voltage amplifier and outputs up to 800 VDC. The effective load of vertical actuator supporting vibration isolation
Passive isolation element	Single hard isotropic elastomer (without compressed air source)
Vibration sensor components	Downward seismic detector type inertial sensor, used to measure ground vibration below the isolator and provide voltage proportional to the speed of vibration motion
Active feedback control loop	Measure, process, and attenuate ground vibrations beneath springs supporting isolation surfaces
Dimensions of isolator (width x depth x height)	14.45 x 14.26 x 6.16* in. 367 x 362 x 157* mm * Unloaded height. Loading may decrease height by up to 0.12 in. (3 mm). Systems with ≥4 isolators may require the addition of external wedge mounts that add 1.6 in. (41 mm) to the height.
Weight of isolator	53 pounds (24 kilograms)
operation temperature	50° - 90° F 10° - 32° C
storage temperature	-40° - 130° F -40° - 55° C
humidity	30 - 60%
System power requirements	100、120、230、240 VAC 50/60 Hz AC； <600 W Compliant with CE standards
ground displacement	<480 μin. (12 μm) below 10 Hzd>
Number of isolators for each system	At least 3
Optional Accessories	Laminated stainless steel platform, frame, riser, leveling device, seismic device, lifting cover

DC-2020 Controller Specifications

Dimensions (width x depth x height)	19 x 8.5 x 1.75 inches 483 x 216 x 45 mm
weight	6.3 pounds (2.9 kilograms)
processor	150/75 MHz dual core
sampling rate	10 kHz
Analog Output	16 channels
analog input	16 channels
STATUS	Single LED
Front panel port	1 serial USB 2.0 1 serial Micro USB 1 Ethernet RJ-45 2 BNCs
Rear panel port	1 serial USB 2.0 1 Ethernet RJ-45 1 RS-232 DB-9 traditional serial for traditional STACIS 2100 isolators
user interface	Front panel LCD display screen Character menu on the super terminal Extended GUI for Microsoft Windows Embedded Ethernet GUI

STACIS users and application areas
1. Microelectronics and Semiconductors
▪ Chip testing
▪ microphotolithographic technique
▪ Mask calibration
2. Scientific research, nanotechnology
▪ SEM、TEM
▪ STEM、SPM
3. Laser table
▪ Life sciences, drug development
4. Industrial applications
▪ precision machining

Why choose an active system?
▪ Starting from<1Hz, strong ground vibrations are eliminated, and pneumatic platforms cannot effectively isolate vibrations at this low frequency
▪ Improve quality and production volume
▪ Smaller and more distinctive imaging capabilities
▪ frontier research
▪ More stable than pneumatic platforms
▪ * * Solution to Install Parameters at SEM Standard Locations
▪ Make the engineering cost of new laboratories and research equipment lower

Why choose STACIS for active systems
▪ It resonates with the voice of researchers and provides the most earthquake free environment possible.
▪ A powerful low-frequency isolation system on the market.
▪ At present, all SEM manufacturers have announced installation parameter requirements, and the required vibration parameters need to be met by an active vibration isolation system.
▪ STAIS * * was invented in the 1990s and further developed by TMC to develop and install thousands of active isolation systems, providing a reliable solution in the field of active isolation control.

Compared to pneumatic isolators, STACIS has several hundred higher rigiditytimes
The stable time, as a response to disturbances, is greatly shortened due to its unique series design, making it ideal for applications in mechanical manufacturing, dynamic loads, and independent rigid tabletops that require installation of lasers or light sources.

The following advantages are all * * in the industry
▪ The active isolation bandwidth of STACIS is 0.6Hz -150Hz
▪ Active vibration cancellation with 6 degrees of freedom, with a vibration interval of 8-10dB at 1Hz
▪ At 2-3Hz, the isolation can reach 90% (20dB)

Professional environmental investigation
1. Environmental investigation before and after installation, including vibration, magnetic field, and sound waves
2. After installation, environmental system certification can be provided
▪ Comprehensive environmental investigation services
▪ Issue a professional environmental report
▪ Provide vibration, magnetic field, sound wave detection and solutions
▪ TMC recommends practical solutions to users based on its extensive experience
▪ Over 40 years of industry experience, with expertise in the field**

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