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E-mail
huahui@shchylyqyxgs.wecom.work
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Phone
15026706579
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Address
No. 115, Lane 1276, Nanle Road, Songjiang District, Shanghai
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Shanghai Chaohui Pressure Instrument Co., Ltd
Capacitive vacuum gauge
NegotiableUpdate on 12/08
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Overview
Capacitive vacuum gauge is suitable for precision vacuum measurement that is crucial for process control in the photovoltaic, semiconductor, and industrial markets. Application: Vacuum furnace, vacuum packaging, plasma sterilizer, freeze-drying, vacuum distillation, petrochemical industry, semiconductor industry, PECVD/ALD process equipment, plasma etching process equipment
Product Details
Capacitive vacuum gauges use highly stable capacitive sensitive components with excellent overvoltage resistance and long-term stability, making them suitable for precision vacuum measurements that are crucial for process control in the photovoltaic, semiconductor, and industrial markets. Advanced manufacturing technology and processes ensure repeatability in application scenarios. The working voltage of this pressure gauge is 24V DC, with a standard (0~10) V DC analog output signal, full-scale measurement, and a usable range of 1Torr (133Pa) to 10Torr (1.33kPa).
Capacitive vacuum gauge Main Features
Industry standard connector
High precision: standard ± 0.5% reading, optional ± 0.25% reading
Precision membrane ensures excellent performance
Wide range of working temperature compensation
Low circuit noise and fast response
Not easily affected by changes in environmental conditions
Excellent anti overvoltage design
Overload and burst pressure rating
Specifications
| range | 10Torr. A/1.33kPa. A |
| precision | ± 0.5% reading; ± 0.25% reading (optional) |
| Working Voltage | (18～24)V DC |
| output signal | (0～10)V DC |
| Operating Temperature | (10～50)℃ |
| measuring medium | gas |
| electrical connector | 9-pin analog interface |
| process connection | KF16 |
| Power on preheating time | 10min |
| Shell material | stainless steel |
| Liquid receiving material | 镍基合金 |
Wiring Definition
Precautions and installation requirements
Precautions
The selected power supply should be consistent with the input power supply of the vacuum capacitance pressure gauge;
The shielding layer of the shielded cable should be connected to the common terminal power supply of the power supply;
The wiring of this series of vacuum capacitance pressure gauges should be connected according to the wiring diagram, and only after confirming that there are no errors can they be powered on!
4. It is prohibited to plug or unplug the plug when powered on;
After using the product, the power plug should be unplugged.
Installation requirements
The vacuum capacitance pressure gauge should be installed vertically upwards;
During the disassembly and assembly process of the vacuum capacitance pressure gauge, care should be taken to handle it with care and avoid collision to avoid instrument errors. Otherwise, recalibration is required before use;
The vacuum capacitance pressure gauge cannot be installed in a vibrating position. If it must be installed in a vibrating position, please connect it with a vacuum hose to provide shock absorption.
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