HORIBA flowmeter AMAT3030-17596

NegotiableUpdate on 01/13

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Nature of the Manufacturer: Producers

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Overview

AMAT3030-17596 EDWARDS Edward, Maglev Molecular Pump Repair, Pufa Molecular Pump Repair, Varian Molecular Pump, ULVAC Molecular Pump Repair, Alcatel Molecular Pump Repair, Leybold Molecular Pump Repair, EDWARDS Molecular Pump Repair, Seiko Seiki Molecular Pump Repair, Shimadzu Molecular Pump Repair, Osaka Molecular Pump Repair Private Partnership

Product Details

AMAT3030-17596

Cryo Plex 16 Low Temperature Pump

Considering a comprehensive and efficient design, the Cryo Plex 10 cryogenic pump can achieve twice the pumping speed of an 8-inch cryogenic pump, making it an ideal clean, oil-free high vacuum exhaust solution.

Standard applications: semiconductor, space environment simulation, vacuum coating, and various research and development fields

Flexible configuration

Supports multiple flange interfaces such as ANSI, ISO, CF, etc

One M600 helium compressor can simultaneously drive one or two Cryo-Pelx10 cryogenic pumps, saving space, electricity, and maintenance work. For large vacuum chambers that require multiple low-temperature pumps, it is an ideal choice.

Standard Design

Austin Scientific's Cryo Plex series cryopumps and compressors can be compatible and replaced with Helix's CryoTor series cryopumps and compressors, greatly facilitating upgrades, repairs, exchanges, and other services.

parameter

Cryo-Plex 10 - Gas pumping speeds liters/second
Air	3,000
Water	9,000
Hydrogen	5,000
Argon	2,500
Gas capacities - standard liters @ 5x10-6 Torr
Hydrogen	24
Argon	2,000
Throughput
Argon sccm	1,500
Crossover
Torr-liters	300
Cool down time
60 Hertz	The widest range of flow and pressure applicability Long term stability ensures the use value of equipment Including products certified for use in hazardous areas Cleanable/washable equipment casing Fluid type gas Flow Range - Full Scale Capacity 3 sccm - 2500 lpm precision ± 0.6% of SP maximum pressure 4500 psig temperature 65oC output type Analog & Digital Metal sealing heat Suitable for processes sensitive to humidity or oxygen High purity flow path can minimize process pollution and improve yield to the greatest extent possible Ultra fast response capability Fluid type gas Flow Range - Full Scale Capacity 3 sccm - 300 slpm precision SP ±1% maximum pressure 150 psig temperature 50oC output type Analog & Digital High temperature heat Maximum operating temperature High precision and repeatability Ultra high purity structure Fluid type Gas, water vapor Flow Range - Full Scale Capacity 3 sccm - 10 slm precision SP ±1% maximum pressure 145 psig temperature 105oC output type Analog & Digital Coriolis The highest accuracy achievable in ultra-low flow processes Built in liquid density meter Equipment suitable for both liquid and gas applications Fluid type Gas, liquid Flow Range - Full Scale Capacity 10 - 27,000 gram/hr precision 0.2% - 0.5% of Rate maximum pressure 4500 psi temperature 65oC output type Analog & Digital 60 Min
Cryopump measurements
Height	23.9'
Weight LBS	85
Inlet flange	ANSI/ISO/CF

Molecular Pump Maintenance Department is a private partnership enterprise specializing in the maintenance of imported molecular pumps, magnetic levitation molecular pumps, conventional molecular pumps, Varian molecular pumps, ULVAC molecular pumps, Alcatel molecular pumps, Leybold molecular pumps, EDWARDS molecular pumps, Seiko Seiko molecular pumps, Shimadzu molecular pumps, Osaka molecular pumps. Shenzhen Tianxuan Vacuum Technology Co., Ltd. Molecular Pump Maintenance Department is committed to building China's largest and most advanced imported molecular pumps, magnetic levitation molecular pumps, conventional molecular pumps, Varian molecular pumps, ULVAC molecular pumps, Alcatel molecular pumps, and more Leybol

HORIBA流量计AMAT3030-17596

HORIBA flowmeter AMAT3030-17596

Cryo Plex 16 Low Temperature Pump

Metal sealing heat

High temperature heat

Coriolis