Micro gas mass flow controller

NegotiableUpdate on 01/18

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

The micro gas mass flow controller is specifically designed for the measurement and control of various small flow gases. The sensors in this series are made using advanced microelectromechanical systems (MEMS) flow sensing chips, combined with digital signal processing technology and flow control algorithms, to achieve precise control and intelligent processing of various gas flow rates.

Product Details

1、 Product Introduction

The micro gas mass flow controller is specifically designed for the measurement and control of various small flow gases.the series The sensors are all equipped with advanced microelectromechanical systems（Using MEMS flow sensing chips, combined with digital signalsNumber location By utilizing advanced technology and flow control algorithms, precise control and intelligence of various gas flow rates can be achievedChemical processing.

Application areas: aerospace, semiconductor processing, medical biology, electronic vehicles, steel metallurgy, marine electronics, industrial gas production, etc

Industry.

2、 Product Features

Adopting microelectromechanical systems(MEMS) flow sensing chip , bypass divisionDesigned with flow regulator and electromagnetic proportional valve, sensing The device has the characteristics of high precision and strong anti-interference ability The bypass fluid of the splitter forms a laminar flowState, thus enabling measurement and control The system is more stable and precise. Electromagnetic proportional valves have a long service life and high sensitivitycharacteristic.

★ The zero point of the sensor is stable.

★ High precision and good repeatability within the measuring range.

★ Fast response time.

★ Standard mechanical interface, easy to install.

★ RS485 communication output, standard MODBUS RTU protocol.

★ adoptLCD displays instantaneous flow and cumulative flow, clear and intuitive, easy to readConvenient to count, can control flow through key input Quantity, display control flow and real-time flow values directly on the LCD screen

★ Standard 4-20mA input/output control.

★ Customizable 0-5V or 0-10V input/output control
3、 Technical parameters

working power supply	DC24V/6W
precision(%)	Control accuracy: ± 1.0% SP, measurement accuracy 0-50L/min 1% fs greater than 50L/min 1.5fs%
Control and measurement quantities Cheng Bi	1： 100
Valve type	Normally closed type
Operating Temperature	-10~55℃
humidity	<95% RH (no frosting, no icing)
Work pressure range enclose	Measurement:0-1.5MPA control 100SCCM-30SPLM pressure: 0.1-1.0MPA 100SPLM pressure: 0.1-0.65MPA 300SPLM pressure: 0.1-0.5MPA
Typical control response time	less than1S （T90）

When measuring response interval	<50mS
output method	4-20mA or 1-5V
contact method	RS485(Modbus Rtu protocol)
Control method	Button operation, Modbus,4-20mA(1-5V)， Customizable 0-5V
Mechanical connection	G1/4, PT1/2 internal thread
Protection level	IP40

Note: The above data is for25℃ , 101.32kPa, Measured under dry air conditions Other Features

Optional standard temperature Degree conditions	0°, 20°, 25 °, user adjustable, default 25 °
Optional gas category type	Air, N2, O2, CH4, Ar, CO2, He, H2 ，C3H8
Work pressure difference	50 SPLM 0.1MPA -0.7MPA 100SPLM 0.1MPA-0.6MPA 300SPLM 0.1MPA -0.4MPA