Multi axis measurement fiber laser ruler

Zhongtu Instrument PLR3000Multi axis measurement fiber laser rulerBased on the principle of laser interferometry measurement, the resolution can reach 10nm and the linear accuracy can reach 0.2ppm. It provides accurate and reliable position feedback and control in modern ultra precision manufacturing, photolithography technology, aerospace and other high-tech fields such as microelectronics, micro mechanics, and micro optics.

1、 Core functions of the product

1. Nano level signal output: 10nm high resolution (supports external expansion), orthogonal digital/1Vpp sine and cosine signal dual output, suitable for various controllers;

2. Full environment adaptation: an integrated environmental weather station that compensates for the impact of environmental parameters on measurements in real-time, ensuring long-term reliable data;

3. Flexible installation design: The laser host is separated from the probe, connected to a 3m armored fiber optic cable, away from heat source interference, and can be easily installed in small spaces;

4. Multi dimensional measurement support: Single axis/dual axis/three-axis free configuration, combined with multiple interferometric probes, easily achieve multi degree of freedom measurement;

5. Dual use mode: It can be used as a laser interferometer for independent measurement or integrated into the system to achieve closed-loop position feedback control;

2、 Product Features

1. Ultra high precision: 10nm resolution+0.2ppm linear accuracy, meeting nanometer level measurement requirements and eliminating product scrap caused by processing errors;

2. Adaptation to complex working conditions: heat source isolation design+real-time environmental compensation, temperature/pressure/humidity changes do not affect data stability;

3. High efficiency and low cost: Multi axis synchronous measurement+fast installation and alignment, reducing equipment debugging time and improving production line flow efficiency;

4. Multi scenario adaptation: 4m long range expandable, dynamic speed support 2m/s, covering all scenarios from static detection to high-speed motion;

3、 Product advantages

1. Precision crushing traditional solution: Compared to steel tape rulers/glass gratings, the grid spacing is more accurate and the resolution is higher. Environmental compensation technology further ensures data stability;

2. Customized adaptation capability: supports range expansion, probe selection, multi-channel output, and customized solutions according to customer production scenarios;

3. Cost reduction and efficiency improvement attributes: compact size reduces Abbe error, quick installation reduces debugging costs, dynamic measurement capability adapts to high-speed production lines;

4. Full cycle reliable guarantee: With the support of laser calibration certification and traceable data, it meets the compliance requirements of industrial production;

4、 Product application

1. Semiconductor manufacturing: precise positioning of lithography machine wafers, closed-loop feedback of precision workpiece stages, and assistance in improving chip manufacturing yield;

2. Aerospace: Engine blade deformation detection, high-precision assembly calibration, ensuring the reliability of core components;

3. Precision machining: CNC machine tool multi axis linkage position feedback, micro mechanical component measurement, improve machining accuracy and efficiency;

4. Research field: stability monitoring of optical platforms, control of ultra precision experimental equipment, supporting the accuracy of cutting-edge research data;

5、 Service and Support

1. Customized solution: PLR3000Multi axis measurement fiber laser rulerProvide flexible options such as probe configuration, range expansion, and environmental compensation units according to requirements.

2. Professional certification: Provide laser calibration certificates to ensure data integrity.

3. Global service network: 1-year warranty, technical support team responds 24/7 to quickly solve on-site problems.

Note: Product parameters will be continuously optimized based on technological iterations, so the relevant content in this product information may be updated or modified at any time according to actual situations without further notice. We apologize for any inconvenience caused.

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