P63. X18Z8S P63. X18Z8K piezoelectric nano positioning table Product features: X-axis stroke 18 μ m/axis, open/closed loop optional, Z-axis stroke, open/closed loop optional, vacuum version optional
P63. X18Z8S P63. X18Z8K piezoelectric nanopositioning platform Product Features
X-axis travel 18 μ m/axis
Open/closed loop optional
Z-direction travel 8 μ m
Open/closed loop optional
Vacuum version is optional
Technical Specifications:
model |
S-closed loop
K-open-loop
|
P63.X18Z8S |
P63.X18Z8K |
unit |
Degree of freedom in motion |
X、Z |
X、Z |
|
drive control |
2-channel drive, 2-channel sensor |
2-channel drive |
|
Nominal travel range (0~+120 V) |
X:16, Z:6 |
X:16, Z:6 |
μm±10% |
Max. Travel range (0~+150 V) |
X:18, Z:8 |
X:18, Z:8 |
μm±10% |
sensor type |
SGS |
- |
|
Closed/Open Loop Resolution |
X0.6 Z0.2 |
X0.2 Z0.1 |
nm |
Closed-loop linearity |
X:0.3, Z:1 |
- |
%F. S. |
Closed loop repetitive positioning accuracy |
0.25 |
- |
%F. S. |
Pitch/yaw/roll |
≤15 |
≤15 |
μrad |
No load resonance frequency |
X2/Z1 |
X2/Z1 |
KHz±20% |
Closed/open-loop no-load step time |
8 |
0.5 |
ms±20% |
bearing capacity |
0.5 |
0.5 |
kg |
Electrostatic capacity |
X:1.8, Z0.8 |
X:1.8, Z0.8 |
μF±20% |
Working temperature range |
-20~80 |
-20~80 |
°C |
material |
aluminium |
aluminium |
|
Line leader |
1.5 |
1.5 |
m±10mm |
P63. X18Z8S P63. X18Z8K piezoelectric nanopositioning platformSize chart
