System level precision laser ruler

Zhongtu Instrument PLR3000 SeriesSystem level precision laser rulerSupported by laser interference core technology and hard core data, the resolution can reach 10nm and the linear accuracy can reach 0.2ppm, providing precise and reliable position feedback and control for complex industrial scenes. Widely used in high demand fields such as ultra precision machining, microelectronics manufacturing, photolithography technology, aerospace, etc.

Compared to traditional steel tape rulers or glass gratings, fiber laser rulers have more precise grid spacing and higher resolution. At the same time, their heat source isolation design ensures higher stability and has the characteristics of quick installation and easy collimation.

1、 Core data

1. Precision ceiling

10nm high resolution (supporting external expansion), PRO version has a linear accuracy of 0.2ppm (ordinary version 0.5ppm), and a stable frequency accuracy as low as 0.02ppm, which is equivalent to a measurement distance error of only 0.8 μ m at 4 meters, meeting the requirements of nanoscale production testing;

2. Full scene adaptation

The maximum range is 4m (expandable as needed), and the dynamic measurement speed supports 2m/s, covering the entire scene from static laboratory testing to high-speed production line linkage;

3. Environmental anti-interference

The integrated environmental meteorological station compensates for the effects of temperature (10-40 ℃), air pressure (650-1150mbar), and humidity (0-95% without condensation) in real-time. The measured data stability remains within ± 0.1ppm under the working conditions of -10 ℃ to 45 ℃;

4. Flexible installation design

The laser host (2.8Kg) is separated from the probe (460-500g), and is connected to a 3m armored fiber optic cable (customizable length). It can be installed in a small space without pressure, and the Abbe error is reduced by more than 60%.

3、 Core advantages

1. Precision crushing traditional scheme

The grid spacing accuracy is three times that of glass gratings, the resolution is 100 times higher than that of steel tape rulers, and the environmental adaptability covers working conditions that traditional equipment cannot cope with;

2. Flexible customization without threshold

Support single/dual/three-axis output, optional differential/plane mirror/pyramid prism probe (maximum resolution 0.5nm), customizable range and cable length, suitable for over 90% of complex scenes;

3. Cost saving installation and use

Compact in size (probe only palm sized), with a collimation adjustment angle of ± 1.5 °, installation and debugging time reduced by 50%, and deployment can be completed without the need for a professional technical team;

4. Dual use value

PLR3000 seriesSystem level precision laser rulerIt can be used as an independent laser interferometer for measurement or integrated into a system for closed-loop position feedback control, meeting multiple requirements with one device.

4、 Application Cases

1. Semiconductor manufacturing: precise positioning of lithography machine wafers, closed-loop feedback of precision workpiece stages, and assistance in improving chip manufacturing yield

2. Aerospace: Engine blade deformation detection, high-precision assembly calibration, ensuring the reliability of core components

3. Precision machining: CNC machine tool multi axis linkage position feedback, micro mechanical component measurement, improve machining accuracy and efficiency

4. Research field: stability monitoring of optical platforms, control of ultra precision experimental equipment, supporting the accuracy of cutting-edge research data

Note: Product parameters will be optimized through technological iterations, and related content may be updated in real-time without prior notice. We apologize for any inconvenience caused.

If you need to learn about parameter details, cooperation policies, or obtain sample testing, please feel free to contact Zhongtu Instrument. Zhongtu's professional team will empower you with production upgrades!