Product Introduction: In practical scientific research, due to the increasing size of samples/wafers, the probe stations used for testing are quite expensive. Our company has independently developed this TDH series probe station based on customer market applications, which has a compact structure, practical functions, and low cost. On the basis of meeting basic testing functions, non essential components are removed. The probe station system includes: optical imaging part, optical base, probe holder, four-dimensional adjustment system, and vacuum adsorption system;
Product information:
In practical scientific research, due to the increasing size of samples/wafers, the probe stations used for testing are quite expensive. Our company has independently developed this TDH series probe station based on customer market applications, which has a compact structure, practical functions, and low cost. On the basis of meeting basic testing functions, non essential components are removed. The probe station system includes: optical imaging part, optical base, probe holder, four-dimensional adjustment system, and vacuum adsorption system;
TDHThe series probe station includes three independent precision probe holders, which can be used in conjunction with digital source meters to complete testing of three terminal devices. It can test materials such as diodes, transistors, field-effect transistors, wafer level devices, etc., and can complete testing of their I/V, c/V, resistance, capacitance, and other parameters.
Product features:
★ Compact structure, practical functions, lightweight quality, easy to move
★ Can be used for testing samples up to 12 inches in size
★ Compatible with high magnification electron microscopes, capable of 360 ° rotation and fine adjustment of lifting and lowering
★ Leakage current accuracy: 10pA/50fa (shielded box)
★ Precision screw/dovetail transmission structure, linear movement, precise displacement, no return difference design
★ Applied to higher education institutions/research institutes/company laboratories
★ Electrode/PAD usage above 1 micron
★ Modular design, which can add and remove corresponding modules according to the application
Product application:
◆ LD/LED/PD intensity/wavelength testing (integrated with our company's optoelectronic instruments)
Analysis and testing of IV/CV and other characteristics of materials/devices
◆ Wafer analysis and testing
Technical parameter selection:
Specifications/Parameters |
model |
TDH-4 |
TDH-6 |
TDH-8 |
TDH-12 |
Dimensions (LWH) |
450×300×355mm |
600×450×355mm |
600×500×355mm |
600×600×355mm |
Power demand |
220VC,50-60HZ |
sample stage |
size |
4 inches |
6 inches |
8 inches |
12 inches |
trip |
Overall XYZR four-dimensional displacement, XY stroke 100mm, Z-axis stroke 13mm, R-axis 360 ° rotation lockable |
Mobile accuracy |
3μm |
Back electrode testing function |
Can lead out electrodes |
Can lead out electrodes |
Can lead out electrodes |
Can lead out electrodes |
Custom Module |
Customizable displacement stroke and accuracy |
Probe adjustment seat |
XYZ itinerary |
13mm-13mm-13mm |
Mechanical accuracy |
Standard configuration: 3 μ m (upgradable/1 μ m) |
Leakage accuracy |
100fA (equipped with shielding box) |
Installation method |
Adjustable magnetic adsorption/vacuum adsorption |
interface type |
Triax axis |
optical imaging |
magnification |
7-200 times (maximum upgradable up to 720 times) |
CCD pixels |
2000W |
center distance |
140mm, Lifting range 270mm, total height 350mm |
monitor |
12 inch monitor, capable of magnifying 3-17mm samples to the entire screen (upgradable large-sized microscope) |
Optional Accessories |
Heating chuck |
High and low temperature chuck |
Gold plated chuck |
Vibration isolation bracket |
Integral Ball Test Options |
shielding box |
RF Test Accessories |
Import light source bracket |
Wavelength monochrome adjustable fiber optic light source (metering current) |
Microscope adjustment manual/electric adjustment device |
Laser cutting microscope |
Adapter accessories |
Chuangpu Instrument can build probe stations according to customer applications to achieve better resultsofUsage effectiveness and cost-effectiveness |