Thermal gas mass flowmeter

Thermal gas mass flowmeter
1、 Working principle:
The μ f thermal chip technology uses large-scale integrated resistors to ensure the height of the sensor, solving the problem that traditional thermal mass flow meters cannot guarantee the resistance value of their sensors, resulting in differences in thermal conduction velocity in various directions. Therefore, traditional thermal mass flow meters have product stability issues during sensor calibration and use. In practical applications, thermal mass flow meters are expensive and difficult to apply on a large scale. The power consumption of the μ f dry heat chip is significantly lower than that of ordinary thermal mass flow meters, making it more reliable, stable, and safe.
On the chip, a micro heat source and temperature sensors located upstream and downstream of the micro heat source are integrated on a hollow bridge deck made using MEMS technology. The use of such a bridge structure is beneficial for the thermal sensor, greatly improving the dynamic response time. When the oscillation sensor works, a certain temperature difference is maintained between the micro heat source and the ambient temperature, forming a fixed temperature field distribution around the chip.

Thermal gas mass flowmeter
2、 Product features:
1. The product has high integration, integrating instantaneous flow display, cumulative flow display, and signal output, and can achieve automatic adjustment, valve control, and no need for secondary instrument display.
2. The μ f micro flow thermal sensor adopts large-scale integrated circuit production technology and new material processing technology, which significantly improves the sensitivity of micro flow measurement of the flowmeter.
3. Micro flow gas measurement, SCCM (ml/min) level dimensional flow measurement and control, realizing the digitization of micro flow measurement.
The microprocessing technology of the flow characteristics of a single chip greatly improves the range of the flowmeter.
4. Integrated electromechanical optimization design and intelligent data processing technology enable flow meters to have better repeatability, achieving accurate and reliable measurement.

5. Optimize the structure and minimize the pressure loss of MFM flowmeter.
6. The MF sensing technology used makes the flowmeter work more stably and reliably.
7. Zero point self calibration function, more accurate measurement.
8. Multiple gas actual calibration, full range compensation.
9. Quick response, automatic digital storage, and network centralized management can be achieved with the help of the upper computer.
10. Complete specifications, wide range of measurement, and can be calibrated separately according to user requirements.
11. High precision level, meeting the high-precision measurement requirements of users.
12. The flow meter alarm function of * makes monitoring more reliable.
13. The operation and setting interface is user-friendly, easy, and relevant parameters can be set according to needs.
14. Utilizing multiple industries, upgrading and replacing small gas flow control products in research institutes, analytical instrument industry, semiconductor industry, photovoltaic industry, glass coating, and chemical industry.