Product Introduction: The WZH series high-temperature probe station system includes: optical imaging part, integral lifting base, high-precision probe holder, temperature control system, vacuum adsorption system, etc; It can be applied to the electrical performance testing and analysis of tested samples in high-temperature environments, such as semiconductor/microelectronics, electronics, mechatronics, physics, chemistry, materials, optoelectronics, nanotechnology, microelectromechanical/MEMS, biochips, aerospace and other scientific research fields, as well as IC design/manufacturing/testing/packaging, LED, LCD/OLED, LD/PD, PCB, FPC and other production and manufacturing fields. It is a powerful high-performance probe station.
Product information:
Probe stations are mainly used for testing in the semiconductor industry, optoelectronic industry, integrated circuits, and packaging. The research and development of precision electrical measurements widely used in complex and high-speed devices aims to ensure quality and reliability, and reduce research and development time and device manufacturing process costs.
The cost-effective manual probe station developed by Chuangpu Instrument is widely used in integrated circuits, transistors, diodes, and photodetectorsIV/CVParameter and other performance testing and characterization are essential basic equipment in optoelectronic research.
WZHThe series high-temperature probe station system includes: optical imaging part, integral lifting base, high-precision probe holder, temperature control system, vacuum adsorption system, etc; Can be applied to the electrical performance testing and analysis of tested samples in high-temperature environments, such as semiconductors/Microelectronics, electronics, electromechanics, physics, chemistry, materials, optoelectronics, nanotechnology, microelectromechanical engineering/MEMSIn the fields of scientific research such as biochips and aerospace, as well asICdesign/manufacture/test/PackagingLED、LCD/OLED、LD/PD、PCB、FPCWaiting in the field of production and manufacturing. It is a powerful high-performance probe station.
Product features:
★ Testeable Wafer Size: 2 inches to 4 inches (can also be upgraded to larger sizes)
★ The overall displacement of the probe holder and sample is very convenient for customers to perform synchronous photoelectric testing on the sample
★ Leakage current accuracy:100fA, up to a maximum of10fA
★ Precision lead screw/Swallowtail transmission structure, linear movement, precise displacement, no return difference design
★ Applied to higher education institutions/institute/Used in the company laboratory
★1Electrode size above micrometers/PADuse
★ Modular design, which can add and remove corresponding modules according to the application
★ Adopting imported temperature control system, excellent temperature stability and temperature control uniformity
Product application:
◆LD/LED/PDThe intensity of light/Wavelength testing (integrated with our company's optoelectronic instruments)
◆ Materials/The device'sIV/CVCharacteristic analysis and testing
◆ Wafer analysis and testing
Technical parameter selection:
Specifications/Parameters |
model |
WZH-4 |
Dimensions (LWH) |
600mm×600mm×450mm |
Power demand |
220VC,50-60HZ |
sample stage
|
size |
4-inch (round/square) can be customized with larger sample tables |
trip |
XY axis stroke 50mm; Z-axis stroke 60mm (rotation function can be added) |
Mobile accuracy |
XY axis overall 1 μ m; Z-axis 10 μ m |
Back electrode testing function |
Can lead out electrodes |
by suction |
Paired with imported oil-free vacuum pump, 7L/min |
Custom Module |
Customizable displacement stroke and accuracy |
temperature control |
Temperature range |
Room temperature -300 ℃ (room temperature -27K) |
precision |
±0.1℃ |
Temperature control stability |
±1℃ |
Uniformity of temperature control |
±3℃ |
Probe adjustment seat |
XYZ itinerary |
13mm-13mm-13mm |
Mechanical accuracy |
1μm |
Leakage accuracy |
100fA/10fA |
Installation method |
Adjustable magnetic adsorption/vacuum adsorption |
interface type |
Triax axis |
optical imaging |
magnification |
7-200 times (maximum upgradable up to 720 times) |
CCD pixels |
2000W |
center distance |
140mm, Lifting range 270mm, total height 350mm |
monitor |
12 inch monitor, capable of magnifying 3-17mm samples to the entire screen (upgradable large-sized microscope) |
Optional Accessories |
Gold plated chuck |
Integral Ball Test Options |
shielding box |
Vibration isolation bracket |
Import light source bracket |
Wavelength monochrome adjustable fiber optic light source (metering current) |
Microscope adjustment manual/electric adjustment device |
Laser cutting microscope |
Adapter accessories |
Chuangpu Instrument can build probe stations according to customer applications to achieve better resultsofUsage effectiveness and cost-effectiveness |