Application and technical points of micro gas mass flowmeter

Micro gas mass flowmeter is a key sensor used for precise measurement of gas mass flow rate. With its advantages of miniaturization, high precision, and fast response, it is widely used in industrial automation, medical equipment, environmental monitoring, and other fields.

Core application areas

1. ‌industrial process control‌
   In the semiconductor manufacturing and photovoltaic industries, precise control of the flow rate of process gases (such as argon and nitrogen) is required. Micro flow meters ensure the stability of processes such as deposition and etching by monitoring gas flow in real-time. In chemical processes, it can also be used for monitoring combustible gases and optimizing reaction gas ratios.

2. ‌Medical respiratory equipment‌
   Ventilators, anesthesia machines and other equipment rely on miniature flow meters to achieve tidal volume monitoring, and the error needs to be controlled within±2%Within. Its microliter level detection capability can accurately track patients' respiratory waveforms, providing critical data support for the treatment of respiratory failure.

3. ‌Environmental monitoring system‌
   Used for monitoring industrial waste gas emissions（SO₂TheNOxCombined with miniaturization design, it can be directly integrated into the unmanned aerial vehicle detection platform. In urban air quality monitoring stations, synchronous measurement is possiblePM2.5WithCO₂Construct a pollution diffusion model based on traffic data.

Key technological breakthroughs

1. ‌Optimization of Thermal Measurement Principle‌
   By using constant temperature differential thermal distribution technology and coordinating micro heating elements with upstream and downstream temperature sensors0.5-1000mL/minRange coverage. The new silicon nitride thin film heating element shortens the response time to80msReduce power consumption40%.

2. ‌MEMSProcess innovation‌
   Based on deep reactive ion etching（Three）The microchannel structure manufactured by technology compresses the channel size to200μmlevel Three dimensional packaging technology enables chip level integration of sensors and signal processing circuits, reducing device size to15×10×5mm³.

3. ‌Intelligent temperature compensation algorithm‌
   Integrated digital temperature sensor array, utilizing least squares support vector machine（LS-SVM）Algorithm construction of multi physics field coupling model, in-20℃~85℃Suppress temperature drift error at ambient temperature±0.8%FSWithin.

4. ‌Low power wireless transmission‌
   adoptLoRaWANThe Communication ProtocolNB-IoTModule, working current reduced to3.2mA@3.3VCombined with energy harvesting technology, it can achieve a five-year battery life for passive monitoring nodes, especially suitable for distributed gas monitoring networks.

Currently, with the deepening of the Internet of Things and intelligent manufacturing, micro gas mass flow meters are undergoing forward multi parameter fusion detection (pressure)/temperature/The development of integrated traffic and self diagnostic functions. The latest release from Honeywell in the United StatesHFDSeries of products, already implemented0.25%At the same time, it has the function of self-cleaning particles while maintaining accuracy, marking a new level of technological maturity in this field.