In fields such as laser communication, satellite optical links, and semiconductor lithography, the millimeter shift of the beam can lead to a cliff like decline in system performance. As a domestic manufacturer of piezoelectric nanopositioning technology, Xinming Technology Co., Ltd. has launched the piezoelectric deflection mirror series, which, with its“Nanoradian level accuracy, millisecond level response, extreme environmental adaptability”The three core advantages have become the key to solving the problem of high-precision beam control“Technological tools”.

1、 Nano arc level positioning accuracy: breaking through the limit of optical control

The Xinming piezoelectric deflection mirror is based on the inverse piezoelectric effect of piezoelectric ceramics, and achieves precise deflection without friction and zero backlash through a flexible hinge parallel guiding structure. Its core advantage lies in sub micro radian level resolution——for exampleP33Series achievable0.02μrad(About)0.004The positioning accuracy of arcseconds is equivalent to1Control the beam landing point error within a kilometer distance not to exceed2Millimeters. This level of accuracy makes it a ground to air solution for satellite laser communication/The core component for precise targeting of inter satellite links: in“Storm and Clouds3numberEstar”In the project, this technology ensures sub micro arc level directional control of optical signals during transmission over tens of thousands of kilometers, providing a stable optical path for high-speed data transmission.

In the field of semiconductor lithography, extreme ultraviolet lithography（EUV）The process has almost strict requirements for the stability of the optical path. The Xinming piezoelectric deflection mirror, with its nanometer level control capability, can accurately correct the optical path deviation between the mask and the silicon wafer, and control the distortion rate of the chip pattern at the nanometer level. Test data from Harbin Institute of Technology shows that its closed-loop positioning repeatability error is lower than0.05μradFar exceeding the micro arc precision of traditional galvanometers.

2、 Millisecond level dynamic response: compensation capability faster than the speed of light

Faced with dynamic disturbances such as satellite orbit vibrations and platform attitude disturbances, the tomorrow piezoelectric deflection mirror of the chip exhibits millisecond level response speed. withS37Taking the series as an example, its step response time is only0.8ms, with load200gCan still be maintained when using lenses15msComplete full travel deflection within. This performance enables real-time compensation of beam jitter caused by spatial vibrations in satellite laser communication, ensuring stable communication links.

In the field of laser processing, this technology solves the accuracy problem of micro hole processing. By controlling the direction of the laser beam through nanosecond level response, the chip tomorrow equipment can control the aperture error within±1μmWithin, the hole spacing accuracy reaches±5μmIt has been successfully applied to the irregular machining of gas film holes in aircraft engine turbine blades.

3、 Extreme Environmental Adaptability: Reliable Guarantee for Space Level

In response to the demand for aerospace applications, Xinming has developed a vacuum low-temperature version piezoelectric deflection mirror. It adopts special packaging technology and aerospace grade components, which can be used in-40℃to+85℃Temperature range, vacuum degree10⁻⁶PaStable work in an environment. in“Kuafu No.1”In the satellite project, the equipment has withstood the test of strong radiation and thermal cycles in space and operated continuously2Annual no performance degradation.

Industrial grade products also have high reliability. Through seismic reinforcement design and fully closed-loop control,S37.T8Series in10gCan still maintain under vibration impact13.5mradThe nanoradian level accuracy within the deflection stroke has passed the vibration testing standard of "Military Equipment Environmental Test Method".

4、 Modular design: seamless transition from laboratory to industrialization

Chip will provide coverage tomorrow0.5mradto20mradA series of products with deflection range and support for customized lens installation methods (adhesive bonding)/Mechanical clamping/Customized hat holder). itsE70Series piezoelectric controllers can be integrated5Device control, bandwidth up to10kHzsupportCAN/EtherCATBus communication. In response to the spatial limitations of semiconductor lithography equipment,XD801-D1Six axis platform150μmDisplacement and2mradThe deflection capability enables compact integration of the internal optical path of the lithography machine.

From the laboratory to the industrial site, tomorrow's piezoelectric deflection mirror is“Higher accuracy, faster speed, and more stable environment”The technological characteristics are driving breakthroughs in fields such as laser communication, precision manufacturing, and aerospace exploration. As he said:“Every nanoradian of control is a challenge to the limits of technology.”In this competition of precision optical control, chip tomorrow has already taken the lead.