Under the probe, precise visualization of the microscopic world is achieved

Zhongtu Instrument NS SeriesCoating step film thickness gaugeIt is an ultra precision contact based micro profile measuring instrument, which combines a precise XY platform with a 360 ° continuous rotating electric rotary table to adjust the position and angle of the sample. The three-dimensional position can be adjusted, which is conducive to sample adjustment. Mainly used for measuring micro morphological parameters such as step height, film thickness, and surface roughness.

NS seriesCoating step film thickness gaugeThe linear variable differential capacitance sensor LVDC is adopted, which has the ability of ultra fine force adjustment and sub angstrom resolution. At the same time, it integrates core technologies such as ultra-low noise signal acquisition, ultra fine motion control, and calibration algorithms, making the instrument have ultra-high measurement accuracy and repeatability.

Product Features

1. Excellent repeatability and reproducibility, meeting the measurement accuracy requirements of the tested object

Linear Variable Differential Capacitive Sensor (LVDC) with sub angstrom resolution, capable of up to 0.01 angstroms in a 13um range. High signal-to-noise ratio and low linear error enable the product to scan morphological features ranging from a few nanometers to several hundred micrometers.

2. Ultra fine force constant force sensor: (1-50) mg adjustable

The force measurement is constant and adjustable to adapt to the surface of hard or soft materials. Ultra low inertia design and small electromagnetic force control achieve precise contact measurement without contact damage.

3. Ultra flat scanning platform

The system is equipped with ultra-high straightness guide rails to eliminate subtle vibrations during motion, improve scanning accuracy, and truly reflect the small morphology of the workpiece.

4. Top view optical navigation system, 5MP ultra-high resolution color camera

5. Fully automatic XY stage, Z-axis automatic lifting, 360 ° fully automatic θ turntable

6. Powerful data collection and analysis system

The stair step meter software includes multiple modules, providing sufficient support for height measurement, analysis, and evaluation of different measured components.

Product features

1. Parameter measurement function

1) Step height: capable of measuring step heights from nanometers to 330 μ m or 1050 μ m, accurately measuring etching, sputtering SIMS、 Materials deposited or removed during processes such as deposition, spin coating, CMP, etc.

2) Roughness and waviness: It can measure the roughness and waviness of the sample. The analysis software can obtain dozens of parameters related to roughness and waviness, such as Ra, RMS, Rv, Rp, Rz, etc., by calculating the micro profile curve scanned.

3) Stress measurement: It can measure the surface stress of various materials.

2. Measurement mode and analysis function

1) Single area measurement mode: After completing Focus, set the scanning starting point and scanning length according to the image navigation map to start measurement.

2) Multi area measurement mode: After completing Focus, set up a single area scanning path based on the image navigation map. Multiple area measurement modes can be formed by arranging several to tens of hundreds of scanning paths based on horizontal and vertical distances, and automatic measurement of all scanning paths can be completed with just one click.

3) 3D measurement mode: After completing Focus, the single area scanning path can be set according to the image navigation map, and the entire scanning area can be set according to the required scanning area width or the spacing and quantity of scanning lines. One click can automatically complete the scanning and 3D image reconstruction of the entire scanning area.

4) SPC statistical analysis: supports the analysis of multiple indicator parameters for different types of tested parts, and provides SPC charts for measuring data of batch samples to statistically analyze the trend of data changes.

3. Dual navigation optical imaging function

The NS200-D model is equipped with a 500W pixel color camera for both frontal and oblique views. The scanning path can be accurately set in the frontal navigation imaging system, and the scanning trajectory can be tracked in real-time in the oblique navigation imaging system.

4. Quick needle change function

The magnetic probe is used, and when a needle replacement operation is required, the scanning probe can be quickly replaced on site and quickly calibrated according to the calibration module in the software to ensure accuracy and repeatability after needle replacement, reducing maintenance troubles.

Physical appearance of magnetic needle (330 μ m range)

Typical Applications

Partial technical indicators

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