Atonarp Process Control Mass Spectrometer Aston ™

NegotiableUpdate on 07/20

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Nature of the Manufacturer: Producers

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Overview

Shanghai Bodong acts as an agent for Japan's Atonarp process control mass spectrometer Aston. By using molecular sensing technology, it provides gas detection and analysis for ALD, CVD, etching, ALE, and chambers in large-scale production of semiconductor processes, realizing online monitoring and diagnosis of exhaust gas, providing solutions for semiconductor process control, improving the yield, throughput, and efficiency of semiconductor manufacturing processes. Installing Aston on existing production process tools can achieve higher wafer yield in a short period of time!

Product Details

Atonarp Process Control Mass Spectrometer Aston ™ Technical specifications:

A universal tool for real-time process control, resistant to corrosive gases and condensation
In situ molecular analysis platform for semiconductor manufacturing, providing real-time and actionable data
Using plasma ionization source, no filament, more durable
Can be fully integrated with large-scale production tools
Aston ™ Process Mass Spectrometry AnalyzerAs a powerful platform, it can replace various traditional tools and provide unprecedented levels of control, including photolithography, dielectric and conductive etching and deposition, chamber cleaning, chamber matching, and digestion

Aston ™ Process Mass Spectrometry AnalyzerTechnical Parameter

type	Impact-300	Impact-300DP	Plasma-200	Plasma-200DP	Plasma-300	Plasma-300DP
model	AST3007	AST3006	AST3005	AST3004	AST3003	AST3002
mass separation	Quadrupoles
vacuum system	molecular pump	molecular pump diaphragm pump	molecular pump	molecular pump diaphragm pump	molecular pump	molecular pump diaphragm pump
detector	FC /SEM
mass range	2-285		2-220		2-285
resolution	0.8±0.2
detection limit	0.1 PPM
operation temperature	15-35“℃
power	350 W
weight	15 kg
size	299 x 218 x 331 LxWxH(mm)		400 x 240 x 325 LxWxH(mm)

Atonarp Aston™ Application: Significant development in semiconductor process control and optimization, improving the yield, throughput, and efficiency of semiconductor manufacturing processes
Aston ™ It is a newly designed, sturdy and durable compact online mass spectrometer suitable for gas monitoring and control in semiconductor manufacturing and industrial process control applications. It combines high quantitative accuracy and real-time performance with production robustness and reliability, such as semiconductor dry pump exhaust gas detection and analysis, to achieve online monitoring and diagnosis
CVD/ALD: Oxide Nitride Transition and Composition Analysis
Etch/ALE End Point :<0.3%
Chamber Matching: Identifying and Tracking Molecules
Aston™ 半导体在线质谱仪应用

If you need further understandingAtonarp Aston ™ On-line Mass spectrometerFor detailed information or discussion, please refer to the following contact information:
Shanghai Bodong: Miss Ye Taiwan Bodong: Miss Wang
T: +86-21-5046-3511 ext 109 T: +886-3-567-9508 ext 161
F: +86-21-5046-1490 F: +886-3-567-0049
M: +86 1391-883-7267 (WeChat ID) M:+886-939-653-958

Some brands are currently recruiting cooperative agents. Interested parties are welcome to contact Ms. Ye from Shanghai Bodong at 1391-883-7267
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