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CTI On-Board® IS 320FX 低温泵

NegotiableUpdate on 07/20
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Overview

The On Board IS 320FX cryogenic pump, developed specifically to address the challenges of today's ion implantation processes, can improve hydrogen extraction speed and capacity while maintaining all the quality, performance, and reliability advantages you expect from the On Board IS 320FE cryogenic pump

Product Details

CTI On-Board ® Advantages of IS 320FX Low Temperature Pump Product:

1. Designed specifically for ion implantation applications

2. Optimized the tool processing capability

3. Intelligent 'self-regulation' technology

4. Lower cost of ownership

5. Increase normal operating time