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Bodong Enterprise (Shanghai) Co., Ltd
HVA vacuum gate valve, vacuum plug valve 21200 series
NegotiableUpdate on 07/20
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Overview
The HVA vacuum gate valve and vacuum plug valve 21200 series are million cycle vacuum gate valves designed specifically for high vacuum applications, especially suitable for applications with high vacuum of 1x10-9 mbar and baking temperature not exceeding 150C The HVA vacuum gate valve and vacuum plug valve 21200 series do not have mechanical locks inside, making them ideal for semiconductor and sensitive processes that require vibration free operation All the axes of the active joints have undergone hardening treatment, reducing the generation of particles and providing smoother driving Cleanliness and high sealing ensure the perfect combination of HVA vacuum valves with low-temperature pumps, turbo molecular pumps, ion pumps, etc Shanghai Bodong is the only designated general agent of HVA vacuum valves in China
Product Details
HVA vacuum gate valve, vacuum plug valve 21200 series product features:
HVA vacuum gate valve, vacuum plug valve 21200 series product features:
1. Linear drive allows the use of welded bellows to seal the drive
2. The unique cylinder design minimizes impact and vibration
3. The HVA vacuum gate valve 21200 series does not have a mechanical lock inside the vacuum chamber, making it particularly suitable for semiconductor manufacturing and other sensitive processing industries that require low vibration
4. All moving joints have hard shafts that effectively reduce particle generation and make driving easier
5. HVA stainless steel valve body vacuum gate valve provides the smallest internal surface area in the vacuum valve industry
The valve body and all internal components are brazed together in a vacuum furnace at 1100 ℃ and 1x10E-6 Torr, ensuring the maximum integrity of the valve
7. In terms of maintenance, the bracket can be removed without removing the vacuum valve from the entire system
8. The valve can be driven manually or pneumatically
9. Standard or customized flanges meet different applications
10. The HVA standard cycle vacuum valve 21200 series can be installed at any position
11. Electromagnetic valve control with manual override
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