| Specification Number |
parameter |
| measurement range |
X-axis |
0-200mm optional |
| Z-axis |
0-620mm optional |
| Z1 axis |
6mm,2mm |
| Linear accuracy |
contour |
≤± 0.07% f.s. (95mm measuring rod) |
| roughness |
≤±(12nm+3%) |
Contour measurement: Line features, point features, distance between points, distance between lines, and positional accuracy of various types of workpiece surfaces, including distance, parallelism, perpendicularity, angle, groove depth, groove width, and radius, can be analyzed for straightness and convexity.
Contour analysis: Pa, Pt, Pp, Pv, Pz, Pq, PS, Psk, Pku, Pmr
粗糙度测量: Ra、Rp、Rv、Rz、Rz(jis)、R3z、RzDIN、Rzj、Rmax、Rc、Rt、Rq、Rsk、Rku、Rsm、Rs、R △ q、Rk、Rpk、Rvk、Mr1、Mr2、Rmr
Waviness parameters: Wa, Wt, Wp, Wv, Wz, Wq, Ws m, Ws k, Wku, Wmr