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Shanghai Beilan Optoelectronics Technology Co., Ltd
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Shanghai Beilan Optoelectronics Technology Co., Ltd

  • E-mail

    ryu@ultrablue-sci.com;info@ultrbalue-sci.com

  • Phone

    13331917708

  • Address

    Room 1019, Building 3, Lane 1000, Lingshan Road, Pudong New Area, Shanghai

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Microscopic spectrophotometer (OPTM series)

NegotiableUpdate on 12/14
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Overview
The OPTM series spectrophotometer uses microscopic spectroscopy to measure absolute reflectance in small areas, allowing for high-precision analysis of film thickness/optical constants. Measure the thickness of coatings through non-destructive and non-contact methods, such as various films, chips, optical materials, and multilayer films.
Product Details

Measure the reflectivity of the target film, accurately measure the film thickness and optical constants! Non contact, Non destructive, Microscopic

The measurement time is only 1 second!

The OPTM series spectrophotometer uses microscopic spectroscopy to measure reflectance in small areas, allowing for high-precision analysis of film thickness/optical constants. Measure the thickness of coatings through non-destructive and non-contact methods, such as various films, chips, optical materials, and multilayer films. In terms of measurement time, it can achieve high-speed measurement of 1 second per point, and is equipped with software that can easily analyze optical constants even for first-time users

显微分光膜厚仪(OPTM系列)(图1)

Product features:

  • The head integrates the necessary functions for measuring film thickness

  • Measurement of high-precision reflectance (multilayer film thickness, optical constants) using microspectroscopy

  • 1:1 high-speed measurement

  • Optical system with wide range under microscopic spectroscopy (UV * * * near-infrared)

  • Security mechanism of regional sensors

  • Easy to analyze guide, beginners can also perform optical constant analysis

  • Independent measuring heads correspond to various inline customization requirements

  • Support various customizations

Measurement items:

  • **Reflectance measurement

  • Analysis of multilayer films

  • Optical constant analysis (n: refractive index, k: extinction coefficient)

Application:

  • Semiconductor: automatic adjustment of wafer samples, wafer bending detection

  • Optical components: detection of emissivity, bending, and other parameters of lens lenses

Product specifications and models


OPTM-A1

OPTM-A2

OPTM-A3

Wavelength Range

230 ~ 800 nm

360 ~ 1100 nm

900 ~ 1600 nm

Film thickness range

1nm ~ 35μm

7nm ~ 49μm

16nm ~ 92μm

Measurement time

1 second/1 o'clock

spot size

10 μ m (* * * less than about 5 μ m)

Photosensitive element

CCD

InGaAs

Light source specifications

Deuterium lamp+halogen lamp

halogen lamp

Power specifications

AC100V ± 10V 750VA (Automatic Sample Stand Specification)

size

555 (W) × 537 (D) × 568 (H) mm (Main body of automatic sample table specification)

weight

About 55kg (the main part of the automatic sample table specification)


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