P63. XY18S P63. XY18K piezoelectric nano positioning table Product features: XY axis stroke 18 μ m/axis; Open/closed loop optional; Load capacity can reach 0.5kg; vacuum version is optional;
P63. XY18S P63. XY18K piezoelectric nanopositioning platformProduct Features
XY axis travel 18 μ m/axis
Open/closed loop optional
Capable of carrying up to 0.5kg
Vacuum version is optional
Technical Specifications:
model |
S-closed loop
K-open-loop
|
P63.XY18S |
P63.XY18K |
unit |
Degree of freedom in motion |
X、Y |
X、Y |
|
drive control |
2-channel drive, 2-channel sensor |
2-channel drive |
|
Nominal travel range (0~+120 V) |
16/axis |
16/axis |
μm±10% |
Max. Travel range (0~+150 V) |
18/Axis |
18/Axis |
μm±10% |
sensor type |
SGS |
- |
|
Closed/Open Loop Resolution |
0.6 |
0.2 |
nm |
Closed-loop linearity |
0.3 |
- |
%F. S. |
Closed loop repetitive positioning accuracy |
0.25 |
- |
%F. S. |
Pitch/yaw/roll |
≤15 |
≤15 |
μrad |
No load resonance frequency |
2 |
2 |
KHz±20% |
Closed/open-loop no-load step time |
8 |
0.5 |
ms±20% |
bearing capacity |
0.5 |
0.5 |
kg |
Electrostatic capacity |
1.8 |
1.8 |
μF±20% |
Working temperature range |
-20~80 |
-20~80 |
°C |
material |
aluminium |
aluminium |
|
Line leader |
1.5 |
1.5 |
m±10mm |
P63. XY18S P63. XY18K piezoelectric nanopositioning platformSize chart
