VH13 series metal sealed piezoelectric actuator

The VH13 series metal sealed piezoelectric actuator can achieve one-dimensional Z-axis displacement, with two stroke options of 42 μ m and 46 μ m. Due to its insulation from the atmosphere, it is much less affected by environmental humidity. It has a longer service life and higher performance, suitable for various applications such as semiconductor device manufacturing equipment and optical communication equipment that require high reliability.