Scanning electron microscope for thermal field emission environment

1Upgraded new products-Environmental scanning technologyHigh resolution field emission scanning electron microscope.

2Complete configuration

QuattroThe field emission scanning electron microscope provides users with high vacuum secondary electron probes, low vacuum secondary electron probes, secondary electron probes under ambient vacuum, backscattered electron probes, and infrared sensorsCCDProbe. Can meet all possible situations that users may encounter in their future work, in order to minimize their requirements for sample preparation.

Low vacuum/Environmental vacuum technology enables non-conductive samples and/Alternatively, water containing samples can be directly imaged and analyzed without conductive treatment, and there is no charge accumulation on the surface of the sample.

3Unique electronic optical technology, mature Schottky field emission electron gun, fixed final stage aperture60°/45°Two stage tapered pole shoes, large working distance precision focusing technology, etc., can be used for conducting and non-conductive samplesEDS/EBSDAnalyze in high vacuum mode, low vacuum mode, or ambient vacuum mode.

Stable large beam current(maximum200 nA)Ensure energy spectrum andEBSDFast and accurate analysis of work.

4Passing through the lens”Design of Differential Pressure Vacuum System

The sample chamber and tube of a regular high vacuum scanning electron microscope are both in a high vacuum state, requiring that the analyzed sample must be a solid conductive sample. If the sample is not solid and conductive, it needs to be processed to meet the requirements. However, among the samples encountered in research work, solid conductive samples are only a small part. Usually, we also encounter non-conductive solid samples, solid samples with surface water or oil content, and non solid samples.

In the environmental scanning electron microscope, a special vacuum system design is used, with three zones and two different pumpsVacuum pumping reduces the vacuum level in the sample chamber, allowing samples that are not suitable for high vacuum to maintain their original stateObserve and analyze the state under a scanning electron microscope.

At the same time, the barrel of the scanning electron microscope is still in a high vacuum state, meeting the requirements of the electron optical system. In environmental scanning electron microscopy, the original state of water containing and biological samples can be maintained by filling the sample chamber with water vapor. The gas pressure in the sample chamber of FEI/Philips environmental scanning electron microscope can be changed between 10Pa and 4000Pa to achieve water balance in the sample, orConduct dehydration and humidification tests on the samples.

5Secondary electronic detector

In a regular high vacuum scanning electron microscope, the following is used:E‐TSecondary electronic detector. This type of detector cannot work in a low vacuum state. In order to detect secondary electronic signals under low vacuum conditions in the sample chamber,FEI/Philips has developed a low vacuum secondary electronic detectorGSED.

GSEDThe resolution of secondary electronic detectors can reach< 1.4 nmThe resolution index is the same as that of ordinary high vacuum electron microscopy. and,GSEDThe detector has overcome itE‐TThe disadvantage of the detector is that it can observe samples that emit light and are heated.

6、Special sample compartment design284mmA large sample warehouse, cast as a whole and driven by a 5-axis motor, providing users with dual guarantees. During manual operation, xTElectron microscope control software also monitors the operation of the sample stage,Ensure the uniqueness of coordinates on the sample. The memory function for sample location and observation conditions allows users to remember the location and electron microscopy conditions of the area of interest,The location and observation conditions that can be restored to memory at any time,Convenient comparative analysis for users.

7Unique single window and four window operating interfaces

At the same time, it can display secondary electron images, backscattered images, and their mixed images, as well as infrared imagesCCDReal time monitoring like.

This can provide comprehensive information. The use of control area functions is very user-friendly,The control function is easy to access.

8、Special infraredCCDdesign

infraredCCDThe probe design can not only monitor the internal situation of the sample chamber in real time, but also control the movement of the sample stage through this window. It can also use this bed to take low magnification photos for navigation.

9Analytical final stage aperture.

In general low vacuum scanning electron microscopes, the spatial resolution and analysis accuracy of energy spectrum analysis are greatly reduced under low vacuum conditions, and the practicality of energy spectrum analysis is basically lost. In environmental scanning electron microscopy,FEI/Philips is equipped with an analytical final stage aperture,It can ensure the spatial resolution and analysis accuracy of energy spectrum analysis under low vacuum conditions.

10Digital scanning technology

In Quattro scanning mirror,FEI/Philips adopts digital electron beam scanning technology,Whether through QuantaXT - Control software to operate the electron microscope,Or is it an external third-party analysis device,All are based on network structure for digital scanning control. for example,If the user is on QuantaInstall the energy spectrometer system on top,The energy spectrometer company only needs to classify it as QuantaThe designed energy spectrum probe is installed inQuattroOn the sample room,Make itQuattro The designed energy spectrum analyzerQuattroProvide a network hub for network connection,The energy spectrometer can be usedQuattroA digital scanner is used to control the scanning of the electron beam on the surface of the sample.

11Vacuum system

Adopting FEI/Philips ion pump, molecular pump, mechanical pump vacuum system,No oil pollution,Quick pumping speed.

12Microscopic Laboratory

QuattroEnvironmental scanning electron microscopy can be equipped with special in-situ sample stages, such as hot stage, cold stage, and stretching stage. From -165 °CUp to 1400 °CPerform dynamic in-situ analysis on multiple samples while maintaining their original state within the temperature range.