Seven Star Huachuang Quality Flow Controller Flow Meter

Seven Star Huachuang Quality Flow Controller Flow Meter

User Manual for Mass Flow Controller and Mass Flow Meter 1 Dear user, thank you for purchasing our D07 series quality flow controller/flow meter products. This manual provides a detailed description of the necessary procedures for the correct and safe use of this series of products. Product users, please carefully refer to this manual and understand it before use. During use, please pay attention to all the content contained in the marked text and precautions. Our company reserves the right not to be held responsible for any property damage or personal injury caused by failure to follow the user manual. Please keep this manual properly for your installation, maintenance, and troubleshooting. 2. Purpose and Characteristics Mass Flow Meter (MFM) is used for precise measurement of gas mass flow rate; Mass Flow Controller (MFC) is used for precise measurement and control of gas mass flow. They have important applications in scientific research and production in various fields such as semiconductor microelectronics, special materials development, chemical industry, petroleum industry, medicine, environmental protection, and vacuum. Its typical application scenarios include electronic process equipment such as diffusion, oxidation, epitaxy CVD、 Plasma etching, sputtering, ion implantation; And vacuum coating equipment, fiber optic melting, microreactor device, mixed gas distribution system, capillary measurement, gas chromatograph and other analytical instruments. The D07 series mass flow controller and mass flow meter have the characteristics of high accuracy, good repeatability, fast response speed, soft start, stable and reliable, and wide working pressure range (can work under high pressure or vacuum conditions). They are easy to operate, can be installed at any position, and are convenient to connect with a computer for automatic control. The D07 series mass flow controller and mass flow meter are generally used in conjunction with the D08 series flow display instrument and other products. The controller and display instrument are connected by a dedicated cable

Seven Star Huachuang Quality Flow Controller Flow Meter

3. Main Technical Indicators Table 1 D07-19B MFC Performance Index Number Project D07-19B1 Flow Specification (0~5, 10, 20, 30, 50, 100, 200, 300, 500) SCCM (0~1, 2, 3, 5, 10, 20, 30) SLM2 Accuracy ± 1% F.S. (20,30SLM: ± 2% F.S.) 3 Linearity ± 0.5% F.S. (20,30SLM: ± 2% F.S.) 4 Repeatability Accuracy ± 0.2% F.S. 5 Response Time ≤ 2 sec6 Operating Pressure Difference Range ≤ 10 SLM： 0.1 ~ 0.5 MPa (14.5~72.5 psid)＞10SLM： 0.1~ 0.3 MPa (14.5~43.5 psid)7 Maximum working pressure 1 MPa, pressure resistance 3 MPa (435.1 PSI), working environment temperature 5 ℃~45 ℃, input and output signal 0 V~+5.00 V (input impedance greater than 100K, output current not greater than 3mA), power supply+15 V 50 mA; -The external dimensions of 15V 200 mA12 are shown in Figure 413, with a weight of 0.95 kg. Note that mass flow meters and mass flow controllers are usually calibrated with nitrogen (N2) at the factory. The unit of mass flow rate is specified as SCCM (standard milliliters per minute); The standard state of SLM (standard liter/minute) is defined as: temperature -273.15K (0 ℃); Air pressure -101325 Pa (760mm Hg) is equivalent to SCCM and "mL/min, 0 ℃, 1atm" in the center of the Seven Star Flow Meter MFC/MFM product, and equivalent to SLM and "L/min, 0 ℃, 1atm" in units. Page 4 of 28 F.S. (Full Scale): Full Scale Table 2 D07-19BM MFM Performance Index Number Project D07-19BM1 Flow Specification (0~5, 10, 20, 30, 50, 100, 200, 300, 500) SCCM (0~1, 2, 3, 5, 10, 20, 30) SLM2 Accuracy ± 1% F.S. (20,30SLM: ± 2% F.S.) 3 Linear ± 0.5% F.S. (20,30SLM: ± 2% F.S.) 4 Repetitive Accuracy ± 0.2% F.S. 5 Response Time ≤ 2sec6 Air Pressure Drop<0.02 MPa (2.9 psid) 7 Maximum Working Pressure 1 MPa 8 Pressure Resistance 10 MPa (1450.4 psi) 9 Working Environment Temperature 5 ℃~45 ℃ 10 Output Signal 0 V~+5.00 V (Input Impedance greater than) 100K, output current not exceeding 3mA) 11 power supply+15 V 50 mA -15 V 50 mA 12 external dimensions as shown in Figure 413 Weight 0.7 kg Main technical indicators of each model of product are shown in Table 1 and Table 2. The D07-19BM model is the flow measurement part of the D07-19B model, and MFM and MFC of the same type have the same technical specifications in the flow measurement part. 4. Structure and Working Principle 4.1 The structural mass flowmeter consists of components such as flow sensors, splitter channels, and flow amplification circuits; On the basis of a mass flow meter, a mass flow controller is formed by adding regulating valves and PID control circuits. The structure of the D07-19B mass flow controller after opening the outer cover is shown in Figure 2.