WafIR ™ Wafer Measurement ATR

NegotiableUpdate on 10/18

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

The accessible horizontal sampling surface can accommodate chips with diameters ranging from 52 x 10 mm to 203 mm (8 inches). Non contact sampling method; The contact with the coupled crystal is outside the measurement area. Due to multiple reflections, the sensitivity is very high. For a chip with a thickness of 0.770 millimeters, 33 reflections are provided from the coating surface.

Product Details

WafIR™Wafer measurementATR

WafIR™ It's a levelATRAccessories for analyzing single-layer and other thin coatings applied on one side of double-sided polished chips. It has a45Silicon crystals with an incident angle of ° can couple light into and out of the chip.WafIRContains a pressure applicator with a pressure pad designed to achieve optimal contact with a small contact area outside the measurement area. The pressure applicator includes a sliding clutch to limit the total force applied to the sample and is compatible with torque wrenches to achieve repeatability.WafIRIt is fully enclosed and used for rapid purification, unlike mostFTIRSpectrometer compatible.

feature

The accessible horizontal sampling surface can accommodate diameters ranging from52 x 10 mmto203 mm（8Inch chips.

Non contact sampling method; The contact with the coupled crystal is outside the measurement area.

Due to multiple reflections, the sensitivity is very high.

For0.770Millimeter thick chips provided from the coating surface33Secondary reflection.

fixed45° Incident angle.

The silicon coupling crystal can be replaced.

The built-in sliding clutch limits the total force applied to the sample.

Unique pressure applicator with gasket to minimize contact with the sample.

Easy to align and use.

PermaPurge™ Samples can be quickly replaced without interrupting cleaning.

including

Silicon coupled crystalsWafIR.

Specify the supporting hardware for the spectrometer.