On October 28th, the "Proposal of the Central Committee of the Communist Party of China on Formulating the 15th Five Year Plan for National Economic and Social Development" was officially released. The "Proposal" clearly proposes in the section of "Accelerating High level Technological Independence and Self improvement" to improve the new national system, adopt unconventional measures, and promote decisive breakthroughs in key core technologies in key areas including integrated circuits and high-end instruments throughout the entire chain. This deployment not only reaffirms the strategic height of the integrated circuit industry, but also emphasizes the key role of high-end instruments in ensuring the security of the national industrial chain.

1、 Responding to policy calls, forward-looking layout of domestic semiconductor substitution

In recent years, the country has successively introduced a series of policies to fully support the innovative development of the entire integrated circuit industry chain and enhance its independent and controllable capabilities. As a listed company in the domestic gas sensor and high-end scientific instrument industry, Sifang Optoelectronics Co., Ltd. (hereinafter referred to as "Sifang Optoelectronics") and its wholly-owned subsidiary Sifang Optoelectronics (Wuhan) Instrument Co., Ltd. (hereinafter referred to as "Sifang Instruments") actively respond to national policy calls, rely on their profound technical accumulation and keen industry insights in the gas sensing field, and proactively layout in the semiconductor precision manufacturing field. They have established a complete technology research and industrialization system, especially in the sensing principles of infrared (NDIR), zirconia, etc., and have the ability to independently research and develop the entire chain from core sensors to high-end analytical instruments.

In response to the extremely strict monitoring requirements for gas environment in semiconductor manufacturing, Sifang Optoelectronics continues to tackle technological challenges, breaking foreign monopolies and independently developing and launching multiple innovative products such as infrared gas sensors and trace oxygen analyzers, accurately solving the core pain points of the industry and providing solid and reliable domestic technical support for the high-quality development of China's semiconductor industry.

2、 Focusing on core technologies, using innovative products to directly address industry pain points

01. Infrared gas sensor: accurately determine the cleaning endpoint and promote green manufacturing

In the thin film deposition (CVD/ALD) process, chamber cleaning is a key step to ensure process stability. The traditional control method based on experience time often adopts excessive cleaning strategies to avoid incomplete cleaning, resulting in huge waste of expensive process gases such as NF ∝.

The Gasboard-2060 infrared gas sensor launched by Sifang Optoelectronics directly addresses this pain point. This product can accurately and intelligently determine the cleaning endpoint by monitoring the concentration changes of by-products such as SiF ₄ in real-time and precisely during the cleaning process. This helps customers achieve precise process control while effectively reducing operating costs and practicing the concept of green manufacturing.

02. Trace oxygen analyzer: 0.1ppm level accuracy, safeguarding the purity of the process environment

In semiconductor manufacturing, oxygen pollution is a "hidden killer" that affects chip yield. Even trace amounts of oxygen (as low as ppm) can trigger unnecessary oxidation reactions, leading to defects in integrated circuits and silicon wafers, damaging the integrity of thin film structures, and seriously affecting the uniformity and reliability of products.

The Gasboard-3050 series low concentration oxygen analyzer independently developed by Sifang Optoelectronics has a minimum resolution of 0.1 ppm and a range covering 0-10 ppm to 100% O ₂. It is equipped with a zirconia sensor that has been verified on site for a long time and has excellent reproducibility and high-speed response characteristics. It can accurately monitor the oxygen content in process gases and equipment chambers, effectively helping customers control oxygen pollution from the source and providing reliable guarantees for improving product yield.

3、 Winning market trust, domestic strength recognized by top customers

by virtue ofexcellentThe product performance and stable quality performance of Sifang Optoelectronics' semiconductor industry gas monitoring solution have successfully entered the supply chain of many mainstream semiconductor manufacturing enterprises and equipment manufacturers in China, and have received continuous procurement and good evaluation from top customers. Customer feedback confirms that Sifang Optoelectronics' products have reached the level of similar imported products in key indicators such as stability and service life, truly achieving domestic substitution.

At the same time, Sifang Optoelectronics actively participates in global top semiconductor industry events such as SEMICON China and CSEAC Semiconductor Equipment Annual Conference. Through the exhibition platform, it deeply exchanges with the industry, continuously expands its brand influence, and demonstrates the innovative strength and enterprising spirit of Chinese enterprises in the field of high-end scientific instruments.

Looking ahead to the new journey of the 15th Five Year Plan, the fate of high-end instruments and integrated circuit industries is closely intertwined. Sifang Optoelectronics will continue to uphold the original intention of technological independence, closely focus on national strategies and industrial needs, continuously tackle the "bottleneck" problems in the field of high-end gas analysis, and empower China's semiconductor industry with more innovative and reliable sensing solutions to improve quality, efficiency, and independent controllability.