Accurate detection data of surface cleanliness tester

Accurate detection data of surface cleanliness tester Accurate detection data of surface cleanliness tester

summary:

The surface cleanliness tester adopts a contact type,measureA device for measuring the number of particles on the surface of an object!yessemiconductor、Panel factory、Equipment vendors and all cleaning component manufacturersforThe inspection standard tool for verifying whether the surface of the component is clean is difficult for the human eye to see particles with a diameter of less than 100 microns. These particles will quickly settle, evade conventional air detection, and accumulate on critical surfaces or products, thereby reducing product yield and stability.

Execution standard:

ISO14644-9：2022 Cleanrooms and Related Controlled Environments Part 9：Evaluation of Particle Concentration and Surface Cleanliness

Technical Specifications:

Control system: PLC

Operating interface: 7-inch touch screen

traffic：28.3L/min+5% built-in flow sensor, automatic closed-loop flow control

light source：Imported Laser IIJIpipe

Test particle size：0.1, 0.15, 0.2, 0.25, 0.3, 0.5, 0.7, 1.0, 3.0, 5.0um (can be customized according to customer needs,ZUIEight more channels)

ZUILarge saturation concentration：2000000/ft³（5%）

clean-down capability：≤10min

number of measurements：0-99 cycles：Measurement interval from 0 to 99999 seconds：Time from 0-9999 seconds：0-9999 seconds

cleanliness class：Levels 1-9

Sampling head specifications：φ36.5

data unit：m³、ft³

SCP level：Level 1-8

Surface type：Round, square

Surface probe：φ12.7mm、φ20mm、φ30mm、φ50mm、φ70mm

data unit：m²、ft²、in²、cm²、mm²

According to the shape of the probe (such as：Circular input diameter, square input length and width dimensions), automatically calculate surface area.

Print function：thermal printer

data storage：Can store 100000 sets of data

weight：15kg

Overall dimensions：300*400*450mm

Power supply: AC220V 50Hz 150W (optional with lithium battery pack)

Basic Configuration：

one host machine

1 copy of instruction manual

1 certificate of conformity

1 copy of delivery receipt

1 power cord

1 set of wrench

One warranty card

One nameplate