ATM to Ultra High Vacuum TripleGauge;

Trigon ™ BCG 552 ATM to Ultra High Vacuum TripleGauge ®

TripleGauge ® BCG 552 integrates three vacuum sensing elements into a sensor flange. This flagship product of the new TrigonTM series has an extremely wide measurement range, ranging from UHV (5 x10-10）To ATM (1500 mbar). Due to the addition of ATM sensors, the BCG 552 can be used for differential pressure measurement and has been used as a vacuum switch in multiple applications. The supported Bayard Alpert dual filament has excellent accuracy, repeatability, and service life in the UHV and HV ranges, while the miniature capacitive diaphragm vacuum gauge has excellent accuracy in the ATM range and is not affected by gas types.

Advantage:

• 1. 3+1 sensing elements, with a wide measurement range, reducing costs and saving space

• 2. Dual filament design

• 3. Pressure measurement independent of gas type (above 10 Torr) provides more reliable load locking control for any mixed gas.

• 4. Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes

• 5. Automatic high vacuum Pirani adjustment reduces operator intervention

• 6. Electrically isolated electronic components can avoid stray currents

• 7. Sliding emission mode to avoid pressure jump and freezing when switching emission flow

• 8. Set point relay

• 9. Bright large screen OLED display (rotatable 90 °) with user interface

• 10. Analog output, RS232C serial interface EtherCAT ® interface

• 11. Can be used in conjunction with the VGC50x controller series

• 12. Backward compatibility with TripleGauge ® BCG450

• 13. Compliant with RoHS regulations

Typical applications:

• 1. Pressure measurement in semiconductor process, transmission, and load lock chambers

• 2. Industrial coating

• 3. General vacuum measurement and control of systems in the range of low vacuum to ultra-high vacuum

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