ATM to ultra-high vacuum dual vacuum gauge

Trigon ™ BPG552ATM to ultra-high vacuum dual vacuum gauge

The measurement range requirement is from UHV (5 x10)-10）Application to ATM (1000 mbar), Trigon ™ The series includes the dual technology BPG552 vacuum gauge. BPG552 consists of a Bayard Alpert thermoelectric sensor element and a classic, robust, and reliable Pirani sensor element. The supported Bayard Alpert dual wire provides precision, repeatability, and service life.

VacXplor is our modular user software designed to enhance your experience using INFICON Trigon vacuum gauges. VacXplor provides a unified interface, dynamic data visualization, and advanced customization options, without the need for administrator privileges during installation.

Advantage:

1. Dual measuring instrument (2 sensing elements), wide measurement range, reduces costs, and saves space

2. Two filaments for Bayard Alpert system

3. Pirani interlock protection to prevent premature burning of the filament

4. Automatic high vacuum Pirani adjustment reduces operator intervention

5. Electrical isolation of electronic components to avoid stray currents

6. Sliding emission mode to avoid pressure jump and freezing when switching emission flow

7. The movable calibration data chip extends the baking time

8. Set point relay

9. Bright large screen OLED display (rotatable 90 °) with user interface

10. Analog output, RS232C serial interface EtherCAT ® interface

11. Can be used in conjunction with the VGC50x controller series

12. Backward compatibility with BPG402

13. Compliant with RoHS regulations

Typical applications:

• 1. Pressure measurement in semiconductor processes

• 2. Industrial coating

• 3. General vacuum measurement and control of systems in the range of low vacuum to ultra-high vacuum