- Phone
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Address
Room 616, 6th Floor, Zhaowei Building, No. 14 Jiuxianqiao Road, Chaoyang District, Beijing
Beijing Yakechenxu Technology Co., Ltd
Room 616, 6th Floor, Zhaowei Building, No. 14 Jiuxianqiao Road, Chaoyang District, Beijing
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Vertical range |
0.1nm to 10mm (closed loop without splicing) |
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Vertical resolution |
0.1nm |
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Mobile range of electric sample stage |
± 150mm (XY axis)/100mm (Z-axis), XYZ three-axis automatic |
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Horizontal sampling interval |
0.1 µ m to 13.2 µ m (determined by the equipped FOV eyepiece and interference objective magnification) |
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Optical lateral resolution |
Up to 350nm |
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Step testing accuracy |
0.75% |
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Step repeatability |
<0.1% 1σ |
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Tilt adjustment |
Manual sample stage adjustment ± 6 ° |
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Vertical scanning speed |
The fastest speed is 47um/second, and users can set it themselves |
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Rotating tower regulation |
Manual and automatic options available |
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Analyze software functionality |
Can perform two-dimensional and three-dimensional analysis, automatic analysis of multiple regions(Can perform statistical numbering on target areas and automatically analyze targetsDistribution of height or depth within the designated area),Can analyze surface roughness, sample surface defects and step height,And it can perform statistical analysis on multiple measurement data to obtain detailed statistical reports(Including mean, variance, minimum, maximum, etc)Programmable automatic multi-point measurement. The available data includes high fidelity 3D images, 2D cross-sectional views, and a large number of complete surface roughness parameters. |