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Bruker ContourGT-K White Light Interferometer

NegotiableUpdate on 03/19
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Overview
Bruker ContourGT-K White Light Interferometer
Product Details
The ContourGT-K 3D optical profilometer has complete surface measurement and analysis functions, with industry-leading measurement performance and flexibility. Adopting patented white light interference technology, with a vertical measurement range ranging from angstroms to millimeters within a large field of view, it has the highest vertical resolution and measurement repeatability in the industry. Its intuitive user interface facilitates users to quickly and efficiently obtain material surface roughness, 2D/3D surface contours, and various high-precision data, which are widely used in IC semiconductors LED、 Solar cells, thin film materialsMEMS、 Precision mechanical components, friction and wear, and other fields meet the practical needs of various surface measurements.
【 Main Applications 】
1. Used for rapid measurement of surface morphology, roughness, three-dimensional contour and other characteristics of a wide range of samples;
2. Widely used for measuring surface roughness of semiconductor materials, warpage of ceramic substrates, laser etching marks, BUMP three-dimensional structures, key dimensions of MEMS devices, TSV hole dimensions, and precision machined parts.
【 Main Parameters 】

Vertical range

0.1nm to 10mm (closed loop without splicing)

Vertical resolution

0.1nm

Mobile range of electric sample stage

± 150mm (XY axis)/100mm (Z-axis), XYZ three-axis automatic

Horizontal sampling interval

0.1 µ m to 13.2 µ m (determined by the equipped FOV eyepiece and interference objective magnification)

Optical lateral resolution

Up to 350nm

Step testing accuracy

0.75%

Step repeatability

<0.1% 1σ

Tilt adjustment

Manual sample stage adjustment ± 6 °

Vertical scanning speed

The fastest speed is 47um/second, and users can set it themselves

Rotating tower regulation

Manual and automatic options available

Analyze software functionality

Can perform two-dimensional and three-dimensional analysis, automatic analysis of multiple regionsCan perform statistical numbering on target areas and automatically analyze targetsDistribution of height or depth within the designated area),Can analyze surface roughness, sample surface defects and step height,And it can perform statistical analysis on multiple measurement data to obtain detailed statistical reportsIncluding mean, variance, minimum, maximum, etcProgrammable automatic multi-point measurement. The available data includes high fidelity 3D images, 2D cross-sectional views, and a large number of complete surface roughness parameters.