CentroTherm VERTICOOmini vertical furnace

Centralem c.VERTICOO Mini is an independent micro batch wafer processing equipment designed for research and development as well as small batch production thermal processing. The unique process chamber and heating system can operate at high temperatures of 1100 ° C. The c.VERTICOO Mini heating furnace from Shangxianchuang Company has a high degree of flexibility due to its small processing batch size, suitable for all standard atmospheric and low-pressure processing. The maximum processing batch of this structure is 50 wafers, thereby reducing the development cost for customers. The design of Shangxianchuang Company has outstanding advantages such as high performance, small footprint, and low cost, while also possessing the high processing flexibility required by many semiconductor device manufacturing processes. c. VERTICOO Mini can add thin wafer loading and unloading devices as needed.

·Atmospheric pressure processing

·Annealing

·Oxidation

·Diffusion

·LPCVD

·PECVD

【 Main Applications 】

·MOS

·VCSEL

·Bipolar transistor

·Discrete semiconductor

·Power Semiconductor

·MEMS

·Optoelectronic components