ULVAC ei-5z series evaporation table

NegotiableUpdate on 03/19

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

Main technical parameters:

Product Details

Product Introduction:

ULVAC ei-5zThe series of high vacuum evaporation coating equipment is a multifunctional evaporation platform that can simultaneously install electron beam evaporation and thermal evaporation sources. It can be used for various metal, alloy, and non-metal evaporation coatings, and can be used for vertical incidence evaporation process. It can also be designed to pass through walls and adopts fully automatic control, which is stable and efficient.

Main technical parameters:

·Suitable for Si, GaAs, glass ceramic and other substrates with various shapes ranging from 2-8 inches;

·Using a low altitude pump, it can achieve 3.0 * 10 within 20 minutes^-4Pa， The ultimate pressure can reach3.0*10^-5Pa or lower；

·Using electron beam or thermal evaporation source, with shared baffles;

·The uniformity of film thickness is better than ± 5%;