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Beijing Yakechenxu Technology Co., Ltd
Bruker ContourGT-X White Light Interferometer
NegotiableUpdate on 03/19
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Overview
Bruker ContourGT-X White Light Interferometer
Product Details
The ContourGT-X is a high-performance instrument suitable for both laboratory research and industrial production. It has accumulated innovation in white light interferometry technology from the previous ten generations of products, achieving rapid three-dimensional surface measurement from nanoscale surface roughness measurement to millimeter level step measurement, with vertical resolution reaching sub nanometer level. The programmable XYZ control and unique scanning head automatic control greatly expand the testing space of the instrument, with multiple automation functions, making operation and use simple and easy. Equipped with the latest Vision64 software, it has the strongest data analysis capabilities in the industry, and its optimized user interface provides great convenience for users to define their own measurements and data analysis. The internal laser self calibration patented technology can automatically calibrate drift caused by environmental or mechanical instability, without the need for standard blocks, reducing the cost of use and ensuring the accuracy of testing.
【 Main Applications 】
1. Used for rapid measurement of surface morphology, roughness, three-dimensional contour and other characteristics of a wide range of samples;
2. Widely used for measuring surface roughness of semiconductor materials, warpage of ceramic substrates, laser etching marks, BUMP three-dimensional structures, key dimensions of MEMS devices, TSV hole dimensions, and precision machined parts.
【 Main Parameters 】
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Vertical range |
0.1nm to 10mm (closed loop without splicing) |
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Vertical resolution |
0.01nm |
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Mobile range of electric sample stage |
± 200mm (XY axis)/100mm (Z-axis), XYZ three-axis automatic |
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Horizontal sampling interval |
0.1 µ m to 13.2 µ m (determined by the equipped FOV eyepiece and interference objective magnification) |
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Optical lateral resolution |
Up to 350nm |
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Step testing accuracy |
0.75% |
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Step repeatability |
<0.1% 1σ |
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Tilt adjustment |
Automatic lens adjustment ± 6 ° |
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Vertical scanning speed |
The fastest speed is 117um/second, and users can set it themselves |
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Machine calibration method |
Laser self calibration (optional) |
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Focus function |
The lens automatically focuses and adjusts the intensity of interference fringes |
