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Beijing Yakechenxu Technology Co., Ltd

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    Room 616, 6th Floor, Zhaowei Building, No. 14 Jiuxianqiao Road, Chaoyang District, Beijing

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Bruker DektakXTL stair step meter

NegotiableUpdate on 03/19
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Overview
Bruker DektakXTL stair step meter
Product Details
Brook Company's new Dektak XTL ™ The probe based profilometer system can accommodate samples up to 350mm x 350mm, applying excellent repeatability to the manufacturing of large-sized chips and panels. The Dektak XTL integrated gas isolation device and convenient interactive locking device enable the instrument to operate in a fully enclosed working environment and cope with complex production environments. Its dual camera setup and high-level automation capabilities can maximize production volume. Vision64 with graphic recognition function unique to Brook Company ® Software and automated production interfaces can meet the needs of IC level users, making data collection an automated process and minimizing the impact of operator changes.
【 Main Applications 】
1. Mainly used for measuring film thickness, stress, surface roughness, and surface morphology, achieving nanoscale surface profile measurement;
2. Widely used in semiconductor devices MEMS、 Metal coating, paint coating, glass coating, solar energy LED、 Touchscreen, medical and other fields.
【 Main Parameters 】

Vertical range

1mm

Vertical resolution

Maximum 0.1nm

Single scan length

55mm (maximum 300mm)

Maximum sample height

50mm

Sample table size

300mmX300mm (automatic) 350mmX350mm (automatic)

Sample table rotation

Two point positioning, 360 degree continuous rotation

Step testing accuracy

<4Å( 1sigma on 1μm step)

Observation system

Dual lens setup