- Phone
-
Address
Room 616, 6th Floor, Zhaowei Building, No. 14 Jiuxianqiao Road, Chaoyang District, Beijing
Beijing Yakechenxu Technology Co., Ltd
Room 616, 6th Floor, Zhaowei Building, No. 14 Jiuxianqiao Road, Chaoyang District, Beijing
|
Vertical range |
1mm |
|
Vertical resolution |
Maximum 0.1nm |
|
Single scan length |
55mm (maximum 300mm) |
|
Maximum sample height |
50mm |
|
Sample table size |
300mmX300mm (automatic) 350mmX350mm (automatic) |
|
Sample table rotation |
Two point positioning, 360 degree continuous rotation |
|
Step testing accuracy |
<4Å( 1sigma on 1μm step) |
|
Observation system |
Dual lens setup |