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Beijing Yakechenxu Technology Co., Ltd
EVG 40NT detection system
NegotiableUpdate on 03/19
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Overview
EVG 40NT is a device mainly used for CD size measurement and bonding alignment measurement, with high precision and can be used as a validation tool for 100nm bonding accuracy in EVG GEMINI FB.
Product Details
Product Introduction:
EVG 40NT is a device mainly used for CD size measurement and bonding alignment measurement, with high precision and can be used as a validation tool for 100nm bonding accuracy in EVG GEMINI FB.
Main features and parameters:
·Top down microscopic flow pattern measurement
·Alignment accuracy measurement
·CD size measurement
·Multi layer thickness measurement
·Can be used as a standalone device or integrated into EVG's large-scale process platform
