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Beijing Yakechenxu Technology Co., Ltd
EVG 770 Nanoimprint System
NegotiableUpdate on 03/19
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Overview
EVG770 is a UV nanoimprint device used for step-by-step and repetitive work, which can effectively fabricate complex structures on substrates. Usually used for wafer level optical manufacturing and master plates required for EVG SmartNIL processes.
Product Details
Product Introduction:
EVG770 is a UV nanoimprint device used for step-by-step and repetitive work, which can effectively fabricate complex structures on substrates. Usually used for wafer level optical manufacturing and master plates required for EVG SmartNIL processes.
Main features and parameters:
·Maximum support for 12 inch (300mm) wafers
·The highest resolution can reach 50nm (depending on the template and process conditions)
·Optional cassette to cassette loading and unloading
