Single vacuum gauge ranging from medium vacuum to ultra-high vacuum

Trigon™ BAG552Single vacuum gauge ranging from medium vacuum to ultra-high vacuum

For applications that require independent thermal ion gauge technology, Trigon ™ The series includes the Bayard Alpert thermoelectric ionization gauge BAG552, which uses a single technology. BAG552 is designed for a pressure range of 5 × 10-10... 2 x 10-2Designed for measuring gas vacuum in millibars. Supports dual filaments, with excellent precision, repeatability, and service life. BAG552 can also be integrated with the INFICON vacuum gauge controller seriesVGC 501TheVGC 502andVGC 503Coordinated use.

Advantage:

• 1. Pure Bayard Alpert measurement system, suitable for ultra-high and high pressure measurement ranges

• 2. Dual filament design

• 3. Electrical isolation of electronic devices to avoid stray currents

• 4. Sliding launch mode to avoid pressure jumps and freezing when switching launch streams

• 5. Mobile calibration data chip extends baking time

• 6. Set point relay

• 7. Bright large screen OLED display (rotatable 90 °) with user interface

• 8. Analog output, RS232C serial interface EtherCAT ® interface

• 9. Can be used in conjunction with the VGC50x controller series

• 10. Compliant with RoHS regulations

• Typical applications:

• 1. Pressure measurement in semiconductor processes

• 2. Industrial coating

• 3. General vacuum measurement and control of systems within the range of high vacuum to ultra-high vacuum

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