- Phone
-
Address
Room 616, 6th Floor, Zhaowei Building, No. 14 Jiuxianqiao Road, Chaoyang District, Beijing
Product Categories
Beijing Yakechenxu Technology Co., Ltd
Trymax3400 series automatic dry adhesive removal
NegotiableUpdate on 03/19
- Model
- Nature of the Manufacturer
- Producers
- Product Category
- Place of Origin
Overview
Trymax3400 series automatic dry adhesive removal
Product Details
【 Main Applications 】
Previous: Light Etching; Descum strip； PR Ashing； After ion implantation, photolithography, and coating processes;
Backward/Advanced Packaging/3D IC: Descum Bumping; Plasma Treatment； Wafer Cleaning, etc.
【 Main Parameters 】
4 loading and unloading mechanisms (300mm)
4-axis robotic arm paired with X movement
Single RF source configuration (13.56MHz)
Single microwave source configuration (2.45GHz)
Dual source configuration (RF/MW)
DCP dual source (RF/RF)
• Suitable for wafer 200mm~300mm
